2016
DOI: 10.1364/oe.24.001431
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Printing of metallic 3D micro-objects by laser induced forward transfer

Abstract: Digital printing of 3D metal micro-structures by laser induced forward transfer under ambient conditions is reviewed. Recent progress has allowed drop on demand transfer of molten, femto-liter, metal droplets with a high jetting directionality. Such small volume droplets solidify instantly, on a nanosecond time scale, as they touch the substrate. This fast solidification limits their lateral spreading and allows the fabrication of high aspect ratio and complex 3D metal structures. Several examples of micron-sc… Show more

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Cited by 78 publications
(53 citation statements)
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“…Furthermore, using fs laser pulses with LIFT operating under the conditions described in Sections and enables the printing of very small metallic features in 2D and 3D configurations for applications such as planar interconnects and vertical vias. Finally, conducting lines of Cu, Al, and Au with minimum widths down to 2 µm and with good electrical properties were successfully printed through this approach …”
Section: Applicationsmentioning
confidence: 99%
“…Furthermore, using fs laser pulses with LIFT operating under the conditions described in Sections and enables the printing of very small metallic features in 2D and 3D configurations for applications such as planar interconnects and vertical vias. Finally, conducting lines of Cu, Al, and Au with minimum widths down to 2 µm and with good electrical properties were successfully printed through this approach …”
Section: Applicationsmentioning
confidence: 99%
“…Because the droplets melt together upon deposition, structures fabricated with LIFT are relative inhomogeneous. The droplet size depends on the size of the focal point of the laser, and thus the exposed area on the donor layer . Layers with a thickness of 3.5 µm have been fabricated .…”
Section: Fabrication Methods For 3d Structures With Areas Of Variousmentioning
confidence: 99%
“…The droplet size depends on the size of the focal point of the laser, and thus the exposed area on the donor layer . Layers with a thickness of 3.5 µm have been fabricated . Moreover, high aspect‐ratio pillars (5 µm in diameter, 860 µm in height) have been fabricated by stacking of droplets ( Figure ) .…”
Section: Fabrication Methods For 3d Structures With Areas Of Variousmentioning
confidence: 99%
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“…A handful of metals, such as gold212, silver13, copper2, aluminum14, and chromium1516, have been deposited using this LIFT method. Various types of applications including emerging energy devices and advanced 3D structures have also been utilized using the LIFT techniques17181920212223. Using vacuum deposition methods, such as sputtering24 and thermal evaporation25, pure thin metal films were first grown on transparent carrier substrates.…”
mentioning
confidence: 99%