Nand Flash Memory Technologies 2015
DOI: 10.1002/9781119132639.ch2
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Principle of Nand Flash Memory

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Cited by 3 publications
(2 citation statements)
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“…9) As mentioned before, such HV devices require a significant area consumption, due to their enlarged Gate to Drain distance. It is expected that such area consumption will become one of the limiting factors to the overall area consumption in 3D NAND memory chips of the future, 10) even if all the periphery devices are fabricated at the bottom of the memory array (which is commonly used in nowadays state of the art solutions). 3,4,15,16) We propose to leverage the 3D structure of the FF [Fig.…”
Section: General Device For 3d Nand Peripheralsmentioning
confidence: 99%
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“…9) As mentioned before, such HV devices require a significant area consumption, due to their enlarged Gate to Drain distance. It is expected that such area consumption will become one of the limiting factors to the overall area consumption in 3D NAND memory chips of the future, 10) even if all the periphery devices are fabricated at the bottom of the memory array (which is commonly used in nowadays state of the art solutions). 3,4,15,16) We propose to leverage the 3D structure of the FF [Fig.…”
Section: General Device For 3d Nand Peripheralsmentioning
confidence: 99%
“…It is expected that such HV devices require significant area consumption already today. 10) Additionally, the total number of memory layers in current 3D NAND is already >200, and expected to increase further, 11) requiring a corresponding increase of the HV peri devices. This poses significant challenges to the area consumption due to HV devices, and even the expected introduction of the wafer to wafer bonding approach 11,12) will not solve it.…”
Section: Introductionmentioning
confidence: 99%