Principle, Design and Future of Inchworm Type Piezoelectric Actuators

Abstract

The inchworm type piezoelectric actuator is one novel actuator to ensure a large working stroke with high resolution which has attracted the continuous attentions from researchers all over the world. In this study, the motion principle of the inchworm type piezoelectric is discussed: the “walker” pattern, the “pusher” pattern and hybrid “walker-pusher” pattern. The classification (linear, rotary and multi-DOF) and development are introduced in details, some significant researches are illustrated. Finally, the future direction of inchworm type piezoelectric actuators is pointed out according the development of inchworm type piezoelectric actuators. This study shows the clear principle, design and future of inchworm type piezoelectric actuators which is meaningful for the development of piezoelectric actuators.

Design and experimental evaluation of an inchworm motor driven by bender-type piezoelectric actuators

“…There are two types of inchworm piezo motors, i.e. the pushed inchworm motor and the crawling inchworm motor, in terms of the driving principle [19,20]. The pushed inchworm piezo motor can produce long travel with a high clamping force, but its mechanical housing problem leads to large dimensions, low precision and small driving force [21].…”