Primary pressure measurements down to 10−6 Pa

Bergoglio, M.; Calcatelli, Anita; Marzola, L; Rumiano, G.

doi:10.1016/0042-207x(88)90486-1

Cited by 34 publications

(16 citation statements)

References 8 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In static expansion systems [9][10][11][12] the ideal gas law is applied. Gas of relatively high pressure in a small volume is expanded into a large volume so that the pressure is reduced according to the volume ratio with a small correction term due to non-isothermal conditions and real gas behavior.…”

Section: Primary Standards For Vacuummentioning

confidence: 99%

Traceability to SI units for vacuum measurement in industrial applications

Jousten

2012

Measurement

View full text Add to dashboard Cite

Section: Primary Standards For Vacuummentioning

confidence: 99%

Traceability to SI units for vacuum measurement in industrial applications

Jousten

2012

Measurement

View full text Add to dashboard Cite

“…In such a case, the validity of the interpolation should be confirmed. A capacitance diaphragm gauge with 1333 Pa full scale (CDG-10Torr) is used for precise pressure measurements in the range from 1 Pa to 10 3 Pa. For the calibration of the CDG-10Torr at least four candidate techniques are available: pressure balance, static expansion system (SES) [1][2][3][4][5], force-balanced piston gauge [6,7], and oil manometer [5,8,9].…”

Section: Introductionmentioning

confidence: 99%

Calibration of Capacitance Diaphragm Gauges with 1333 Pa full scale by Direct Comparison to Resonant Silicon Gauge and Static Expansion System

Yoshida¹,

Komatsu²,

Arai³

et al. 2014

ACTA IMEKO

View full text Add to dashboard Cite

<p>Two capacitance diaphragm gauges (CDGs) with 1333 Pa full scale, with a heated sensor head and an unheated one, respectively, were calibrated by three different methods; direct comparison to a resonant silicon gauge calibrated by a pressure balance, direct comparison to a CDG with 133 Pa full scale calibrated by a static expansion method, and the static expansion method. The calibration results of the three calibration methods show good agreement within their claimed uncertainties. Calibrated higher pressure points of CDGs by the pressure balance and lower pressure ones by the static expansion system are linearly interpolated within the calibrated uncertainty. Here, compensation of the thermal transpiration effect is important when a CDG is used with a heated sensor head.</p>

show abstract

“…The principle of continuous gas expansion is widely used in high vacuum standards, e.g. [1][2][3][4]. Traditionally, the number density of the gas, n, in the calibration chamber, is calculated from the formula…”

Section: Introductionmentioning

confidence: 99%

Comparison of the experimental data and the simulation results of backstreaming effect in the continuous gas expansion vacuum standard

2005

Self Cite

View full text Add to dashboard Cite

The backstream from the pumping chamber to the calibration chamber in a continuous gas expansion vacuum standard was determined using an experimental method and the Monte-Carlo (MC) simulation. The results were compared and appeared to be in agreement within 2 × 10 −5 . This supports our opinion that the MC method can be a useful tool in an analysis of vacuum metrological systems. We can also conclude that, in analysis of high vacuum standards, the assumption that the scattering process is described by the cosine law is reasonable.

show abstract

Primary pressure measurements down to 10−6 Pa

Cited by 34 publications

References 8 publications

Traceability to SI units for vacuum measurement in industrial applications

Traceability to SI units for vacuum measurement in industrial applications

Calibration of Capacitance Diaphragm Gauges with 1333 Pa full scale by Direct Comparison to Resonant Silicon Gauge and Static Expansion System

Comparison of the experimental data and the simulation results of backstreaming effect in the continuous gas expansion vacuum standard

Contact Info

Product

Resources

About