Pretreatment of PC as condition for the homogeneous etching of AR-nanostructures

Schulz, Ulrike; Munzert, Peter; Reinhard, Sylvelin; Rickelt, Friedrich; Knopf, Heiko; Weber, Cristiane; Kaiser, Norbert

doi:10.1364/oic.2016.fb.5

Optical Interference Coatings 2016 2016

DOI: 10.1364/oic.2016.fb.5

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Pretreatment of PC as condition for the homogeneous etching of AR-nanostructures

Ulrike Schulz

Peter Munzert

Sylvelin Reinhard

et al.

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Pretreatment of PC as condition for the homogeneous etching of AR-nanostructures

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