2013
DOI: 10.4028/www.scientific.net/amm.479-480.380
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Pressure Distribution in the Air Film and the Porous Conveyor Air Bearing

Abstract: The porous aerostatic conveyor bearings are used to feed large substrates such as the flat panel display glass sheets and the silicon wafers by supporting them with compressed air in a non-contact condition. Due to unevenly distributed pressure in the air film between the substrate and the porous aerostatic conveyor bearing, the soft substrate often deforms and tilts on the bearing pad during the feeding process. In order to investigate the pressure distribution in the air gap, the CFD software, FLUENT, was em… Show more

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Cited by 2 publications
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“…The total number of cases was 13000. The steps in the differences (12)(13)(14)(15)(16)(17)(18)(19) were ∆t x = ∆t y = 0.00025 • , and…”
Section: Resultsmentioning
confidence: 99%
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“…The total number of cases was 13000. The steps in the differences (12)(13)(14)(15)(16)(17)(18)(19) were ∆t x = ∆t y = 0.00025 • , and…”
Section: Resultsmentioning
confidence: 99%
“…Cui et al [14] used FLUENT Various numerical methods and engineering packages have been adopted for air pressure calculations in porous bearings. Huang et al [13] analyzed the pressure in a porous conveyor air bearing using the FLUENT software. Cui et al [14] used FLUENT software to numerically analyze the effect of manufacturing errors on the load-carrying capacity and stiffness of an annular-thrust porous aerostatic bearing.…”
Section: Introductionmentioning
confidence: 99%
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