Present and future applications of magnetic nanostructures grown by FEBID

Fernández-Pacheco, Amalio

doi:10.1007/s00339-014-8617-7

Cited by 38 publications

(43 citation statements)

References 66 publications

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“…Depending on the metal content of the nanocomposite, different electrical transport regimes are found and a variety of applications have been proposed [4,5]. Prototype devices for spintronics and nanoelectronics require high metal content materials, which, up to date, have been obtained only by means of a few homonuclear carbonyl precursors like Co 2 (CO) 8 , Fe(CO) 5 and Fe 2 (CO) 9 [7,19,20,32,33]. Recently, in order to expand the number of materials available, the fabrication of binary alloys obtained by mixing two precursor gases, has been considered [12].…”

Section: Discussionmentioning

confidence: 99%

“…Additional design goals for the ideal FEBID precursor are sufficient thermal stability and suitable vapor pressure, i.e., in the range of 10 −2 to 50 mbar, at about room temperature. The precursors Fe(CO) 5 and Co 2 (CO) 8 have shown to yield high metal content deposits, and functional magnetic iron and cobalt nanostructures with lateral size below 30 nm have been grown [5][6][7]. However, great care has to be taken in utilizing these precursors, since both are inclined to spontaneous dissociation on activated surfaces, as has been shown in several studies [8,9].…”

Section: Introductionmentioning

confidence: 99%

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Direct writing of CoFe alloy nanostructures by focused electron beam induced deposition from a heteronuclear precursor

et al. 2015

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Recently, focused electron beam induced deposition has been employed to prepare functional magnetic nanostructures with potential in nanomagnetic logic and sensing applications by using homonuclear precursor gases like Fe(CO) 5 or Co 2 (CO) 8 . Here we show that an extension towards the fabrication of bi-metallic compounds is possible by using a single-source heteronuclear precursor gas. We have grown CoFe alloy magnetic nanostructures from the HFeCo 3 (CO) 12 metal carbonyl precursor. The compositional analysis indicate that the samples contain about 80 at% of metal and 10 at% of carbon and oxygen. Four-probe magnetotransport measurements are carried out on nanowires of various sizes down to a width of 50 nm, for which the room temperature resistivity of 43 µΩcm is found. Micro-Hall magnetometry reveals that 50 nm×250 nm nanobars of the material are ferromagnetic up to the highest measured temperature of 250 K. Finally, the TEM microstructural investigation shows that the deposits consist of a bcc Co-Fe phase mixed with a FeCo 2 O 4 spinel oxide phase with nanograins of about 5 nm diameter.2

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Section: Discussionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Direct writing of CoFe alloy nanostructures by focused electron beam induced deposition from a heteronuclear precursor

et al. 2015

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“…The deposits fabricated by means of these precursors are either amorphous or granular metals made of metallic nanoparticles embedded in a carbonaceous matrix. Depending on the metal atomic species and the atomic concentrations, either insulating, semiconducting, metallic or superconducting samples can be prepared [18,19,22].…”

Section: Discussionmentioning

confidence: 99%

Fabrication of FeSi and Fe3Si compounds by electron beam induced mixing of [Fe/Si]2 and [Fe3/Si]2 multilayers grown by focused electron beam induced deposition

Porrati

Sachser

Gazzadi

et al. 2016

Journal of Applied Physics

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Fe-Si binary compounds have been fabricated by focused electron beam induced deposition by the alternating use of iron pentacarbonyl, F e(CO) 5 , and neopentasilane, Si 5 H 12 as precursor gases. The fabrication procedure consisted in preparing multilayer structures which were treated by low-energy electron irradiation and annealing to induce atomic species intermixing. In this way we are able to fabricate F eSi and F e 3 Si binary compounds from [F e/Si] 2 and [F e 3 /Si] 2 multilayers, as shown by transmission electron microscopy investigations. This fabrication procedure is useful to obtain nanostructured binary alloys from precursors which compete for adsorption sites during growth and, therefore, cannot be used simultaneously.

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“…[6,7]. Focused Electron Beam Induced Deposition (FEBID) is one of the existing techniques for the growth of magnetic nanostructures, as recently reviewed [8,9]. In this technique, a precursor material containing a magnetic element is injected in the process chamber and then dissociated by a focused electron beam.…”

Section: Introductionmentioning

confidence: 99%

High Volume-Per-Dose and Low Resistivity of Cobalt Nanowires Grown by Ga+ Focused Ion Beam Induced Deposition

Sanz-Martín

Magén

2019

Nanomaterials

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The growth of ferromagnetic nanostructures by means of focused-Ga + -beam-induced deposition (Ga + -FIBID) using the Co 2 (CO) 8 precursor has been systematically investigated. The work aimed to obtain growth conditions allowing for the simultaneous occurrence of high growth speed, good lateral resolution, low electrical resistivity, and ferromagnetic behavior. As a first result, it has been found that the competition between deposition and milling that is produced by the Ga + beam is a limiting factor. In our working conditions, with the maximum available precursor flux, the maximum deposit thickness has been found to be 65 nm. The obtained volumetric growth rate is at least 50 times higher than in the case of deposition by focused-electron-beam-induced deposition. The lateral resolution of the deposits can be as good as 50 nm while using Ga + -beam currents lower than 10 pA. The high metallic content of the as-grown deposits gives rise to a low electrical resistivity, within the range 20-40 µΩ·cm. Magnetic measurements confirm the ferromagnetic nature of the deposits at room temperature. In conclusion, the set of obtained results indicates that the growth of functional ferromagnetic nanostructures by Ga + -FIBID while using the Co 2 (CO) 8 precursor is a viable and competitive technique when compared to related nanofabrication techniques. Nanomaterials 2019, 9, 1715 2 of 12 magnetic resonance force microscopy, in sharp contrast to other nanofabrication techniques requiring resists [19]. Other reported applications of magnetic FEBID deposits comprise nanoactuation [20], domain-wall pinning [21], nano-Hall sensors [22], nanomagnetic logic [23], superconducting-vortex pinning [24,25], etc. In addition, the capability of FEBID for the growth of complex three-dimensional (3D) magnetic structures is being explored in the rising field of 3D nanomagnetism [26].FEBID has long suffered from two disadvantages when compared to other nanofabrication techniques: the material purity and the growth speed. In the last years, various growth strategies and post-growth purification treatments have been successfully developed to enhance the material purity of magnetic deposits that are grown by FEBID [27][28][29][30][31][32]. However, the growth speed of magnetic nanostructures by FEBID continues to be a bottleneck regarding its broader use. Existing literature on the topic indicates that the volumetric growth rate of nanostructures with the widely-used Co 2 (CO) 8 precursor is in the range of 0.002 µm 3 /nC [33]. Low electron currents must be used to obtain magnetic structures with good lateral resolution (below 1 nA), which gives rise to long growth times. As an example, the growth of a 100 nm-thick 1 µm 2 -rectangle takes 8 min. if an electron beam current of 100 pA is used.In the present work, we have systematically explored the possibility of using a Ga + focused ion beam to grow Co magnetic nanostructures with good lateral resolution, low electrical resistance, and high growth speed by means of the Focused Ion Beam Induced De...

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Present and future applications of magnetic nanostructures grown by FEBID

Cited by 38 publications

References 66 publications

Direct writing of CoFe alloy nanostructures by focused electron beam induced deposition from a heteronuclear precursor

Direct writing of CoFe alloy nanostructures by focused electron beam induced deposition from a heteronuclear precursor

Fabrication of FeSi and Fe3Si compounds by electron beam induced mixing of [Fe/Si]2 and [Fe3/Si]2 multilayers grown by focused electron beam induced deposition

High Volume-Per-Dose and Low Resistivity of Cobalt Nanowires Grown by Ga+ Focused Ion Beam Induced Deposition

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