Preparation, structure and properties of MoSx films

Weise, G.; Mattern, N.; Hermann, H.; Teresiak, A.; Bächer, I.; Brückner, W.; Bauer, H.‐D.; Vinzelberg, H.; Reiss, Günter; Kreißig, U.; Mäder, Michael; Markschläger, Patrick

doi:10.1016/s0040-6090(96)09165-1

Cited by 77 publications

(39 citation statements)

References 16 publications

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“…A linear dimension in the order of 10 to 20 basal planes was roughly calculated. The value and also the XRD pattern itself corresponds well to the calculated patterns of G. Weise et al [8]. Measurements of the 100 and 110 pole figures showed constant integral intensity which means there is a random orientation of the structural units without any texture.…”

Section: Coatings By Magnetron Sputteringsupporting

confidence: 86%

MoS2 coatings for the narrow support elements of the W-7X nonplanar coils

Koch

Nocentini

Heinemann

et al. 2007

Fusion Engineering and Design

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WENDELSTEIN 7-X (W7-X) is a stellarator presently under construction and assembly in Greifswald, Germany. The superconducting magnet system of W7-X consists of planar and non planar coils. The electromagnetic forces on the superconducting magnet are supported by backing of all coils against a central ring and by wedging among coil casings through "Narrow Support Elements" (NSE) that have to satisfy very specific requirements. Anti friction MoS 2 coatings have been developed and tested at room and cryogenic temperature (77K) to allow relative sliding of adjacent coils under load without stickslip to avoid coil quenching. The influence of thickness on the coating endurance has been demonstrated. To prevent ageing both constructive methods and protective top coats have been investigated. This paper describes the atomic sputter deposition technique, the reduced and full-scale tribological tests, ageing tests and arrangements to protect the coatings from humidity and oxidation which have been carried on so far.

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Section: Coatings By Magnetron Sputteringsupporting

confidence: 86%

MoS2 coatings for the narrow support elements of the W-7X nonplanar coils

Koch

Nocentini

Heinemann

et al. 2007

Fusion Engineering and Design

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“…The broadening or drop in the intensity of the (10L) plan is observed with the progressive decrease of the lateral dimensions of the basal plans and the platelets. This situation would arise when the lateral order of the basal plans did not exceed a couple of lattice parameters [3]. It should be pointed out that similar results have been obtained in case of W-S-C films, where the existence of WS 2 nanograins in a carbon matrix was confirmed by HRTEM observation [4].…”

supporting

confidence: 66%

TEM investigation of MoSeC films

2008

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Transition metal dichalcogenides (TMD) are widely used as self-lubricating material either as oil additive or directly as thin films. Magnetron sputtering is a deposition method allowing depositing such films with high density and adhesion. However, their spread use in practical applications is still hindered since their excellent sliding properties are deteriorated in the presence of humidity and under high contact pressures. MoSe 2 , one of the members of TMD family recently studied [1], has been co-sputtered with carbon in order to improve the mechanical and tribological properties when compared to pure MoSe 2 films.The films have been deposited by co-sputtering from a C target embedded with a different number of MoSe 2 pellets. Prior to the deposition of Mo-Se-C films a 300 nm Ti layer was deposited on the steel and Si substrates in order to improve the adhesion. The chemical composition was measured by electron probe microanalysis (EPMA). Cross-sectioned specimens were prepared from samples containing 38, 51 and 68 at.% of carbon (Se/Mo ratio 1.8, 1.8 and 2.0, respectively) by mechanical polishing and ion milling. The morphology and the chemical composition of the coatings were investigated by HRTEM and EDS in a Philips-CM300 microscope. To support TEM analysis, the coatings were tested by Raman spectroscopy (Ar + laser, 514.5 nm wavelength), X-Ray Photoelectron spectroscopy (XPSMg Kα radiation) and X-ray diffraction (XRD -Brag-Brentano configuration in glancing mode, Co Kα radiation) and their hardness was evaluated by depth sensing indentation (Fisherscope H100, maximum load 50 mN). The XPS spectra were taken after ion etching with Ar+ ions (3 KeV and 5 μA/cm 2 ) during 3 min.TEM micrographs show that film morphology strongly depends on the C content ( Fig. 1). By increasing the C content of the films, the MoSe 2 nanocrystallites became smaller as indicated by the increase of the width of the diffraction rings in SAED patterns. At the same time the film morphology became more homogeneous. The contrast observed in the Mo-Se-C layers, after about 200 nm thickness, can be attributed to the material porosity, probably related to the typical columnar morphology usually developed in TMD films. The lower part of the films looks more dense and homogeneous (low porosity). The films porosity clearly decreases with increasing C content ( Fig. 1 and 2); simultaneously, the columnar structure almost vanishes. This result complements the information obtained by previous SEM analysis of MoSe-C coatings published in Ref [1], (see the right part of the pictures in figure 1) where the aspect of low density is kept even for high C content films. Based on TEM analysis, it seems that the columnar growth is typical only for low carbon coatings and the dendritic growth described in Ref [2] and observed in figure 1 is probably only an artifact originated during sample breaking. The increase of the material density could promote the improvement of the hardness from 1.4 to 4.0 GPa with increasing C content in the range 38-68 at.%....

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“…With the progressive decrease of the lateral dimensions of the basal plans, either broadening or drop in the intensity of the (10L) plan occurred until a unique low intensity and broad peak typical of an amorphous structure was detected. This situation would arise when the lateral order of the basal plans did not exceed a couple of lattice parameters [13]. It has been shown that similar extended peak shoulder was present in XRD of W-S-C films, where the existence of WS 2 nanograins in a carbon matrix was confirmed by HRTEM observation [8].…”

Section: Morphology and Structurementioning

confidence: 76%

“…Finally a last peak positioned at 2θ ≈ 70°has been indexed as (110). Weise et al [13] demonstrated that the extended shoulder of the sputtered MoSe 2 peak positioned close to 2θ ≈ 40°cor-responded to a turbostrating stacking of (10L) planes (L = 0, 1, 2, 3). XRD patterns then could be explained by a 2D organization of the basal plans which could have several tenths of unit cells dimension.…”

Section: Morphology and Structurementioning

confidence: 99%