Preparation of Zinc Titanate Thin Films by Low‐Pressure Metalorganic Chemical Vapor Deposition

Abstract

Homogeneous thin films of zinc titanate have been successfully prepared on Si(100) wafers by depositing a film of zinc and titanium oxides (ZnO‐TiO2) by low‐pressure metalorganic chemical vapor deposition (MOCVD), followed by an annealing treatment. The precursors used for the deposition were diethylzinc (DEZ), tetraisopropoxide titanium (TPT), and water. By performing the deposition at temperatures between 140 and 350C, the stoichiometry of the as‐deposited films could be effectively controlled over Zn/Ti ratios between 0.5 and 2.5, which cover the composition of various zinc titanate phases identified in the literature. The as‐deposited ZnO‐TiO2 films are amorphous, and possess a fairly smooth surface. XPS and SIMS analysis showed that the composition of these films is uniform over the wafer as well as through the films bulk. An annealing treatment of the as‐deposited films at high temperature

Preparation, characterization and photocatalytic properties of ZnTiO3 powders

“…ZnTiO 3 with perovskite structure is a potential candidate for applications in microwave dielectrics, gas sensors, sorbents for the desulfurization of hot coal gases and paint pigments [15][16][17][18][19][20][21]. Recent studies have also found that it can be a useful candidate for microwave resonator materials and more preferably for low temperature co-fired ceramics [22].…”

Influence of La-doping on phase transformation and photocatalytic properties of ZnTiO3nanoparticles synthesized via modified sol–gel method

“…Recently, perovskite zinc titanate (ZnTiO 3 ) has been investigated due to its wide range of applications in microwave dielectrics, sorbents for the desulfurization of hot coal gases, paint pigments, gas sensors and more preferably for low temperature co-fired ceramics. [10][11][12][13][14][15][16][17] In addition, ZnTiO 3 is one of the important photocatalysts and has been widely used for degradation of organic compounds. 18 Fundamental studies concerning the phase diagram and the characterization of the ZnO-TiO 2 system have been published by Dulin and Rase.…”

Dielectric properties of zinc titanate thin films prepared by Rf magnetron sputtering

“…Most of those studies involve only bulk system. References concerning the characteristics of zinc titanate based thin film are generally lacking, except the report of Chen et al regarding the zinc titanate thin film prepared by a metalorganic chemical vapor deposition [4,14]. However their studies only limited to the analyses of phase, composition and microstructure of thin film, especially focusing on Zn 2 TiO 4 phase for the catalytic application.…”