Preparation of UV-VIS high index coating materials with PIAD using xenon as a working gas

Wilbrandt, Steffen; Stenzel, Olaf; Schlegel, Ralph; Kaiser, Norbert

doi:10.1364/oic.2013.wc.6

Optical Interference Coatings 2013

DOI: 10.1364/oic.2013.wc.6

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Preparation of UV-VIS high index coating materials with PIAD using xenon as a working gas

Steffen Wilbrandt

Olaf Stenzel

Ralph Schlegel

et al.

Abstract: Xenon assistance in PIAD coating deposition processes offers highest densification when applied to suitable materials. We present experimental results on HfO 2 and Ta 2 O 5 layers pursuing applications in UV coating technology.

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Preparation of UV-VIS high index coating materials with PIAD using xenon as a working gas

Abstract: Xenon assistance in PIAD coating deposition processes offers highest densification when applied to suitable materials. We present experimental results on HfO 2 and Ta 2 O 5 layers pursuing applications in UV coating technology.

Cited by 0 publications

References 6 publications

No citations

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