Preparation of trichlorosilane by plasma hydrogenation of silicon tetrachloride

Гусев, А. В.; Корнев, Р. А.; Sukhanov, A. Yu.

doi:10.1134/s0020168506090172

Cited by 24 publications

(11 citation statements)

References 5 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…Since mg‐Si has metallic impurities, it leads to contamination of the obtained TCS and thus is not so attractive. In the absence of mg‐Si, the hydrogenation of STC can give TCS of higher purity and has been achieved through the use of catalysts such as CuCl or metal–carbon composites , or with use of plasma techniques . These techniques for STC hydrogenation are relatively efficient, but considering that the demand for high‐purity silicon will continue to increase at large rates, especially due to the photovoltaic industry growth, hydrogenation techniques that form TCS through the so‐called “clean conversion process,” which is described by the overall reaction

\begin{matrix} true \\ right {SiCl}_{4} + H_{2} \to {SiHCl}_{3} + HCl \end{matrix}

…”

Section: Introductionmentioning

confidence: 99%

Kinetics of the Conversion of Silicon Tetrachloride into Trichlorosilane Obtained through the Temperature Control along a Plug-Flow Reactor

Kunioshi

Moriyama

Fuwa

2015

Int. J. Chem. Kinet.

View full text Add to dashboard Cite

A process for obtaining trichlorosilane (TCS or SiHCl3) from hydrogenation of silicon tetrachloride (STC or SiCl4) through control of the temperature along a one‐dimensional plug‐flow reactor at atmospheric pressure was simulated using a reaction model that was built based on a literature review: Rate coefficients for reactions that occur in silicon CVD processes were adopted from published data. A compact model made available recently in the literature for simulating reactions occurring in silicon chemical vapor deposition (CVD) reactors was used as a basis, and more reactions from other sources were added for better description of the thermal decomposition of STC. The kinetic model built in this work comprised 63 elementary reactions occurring among 26 species. This model was applied to the calculation of the species concentration profiles along the reactor, which was divided into two parts: a STC hydrogenation step, proceeding at a high and constant temperature in the first, and a cooling step, where the gases are brought to room temperature, in the second part. When the hydrogenation temperature was set to 1273 K or higher, the first step was just a stage where the gases reached chemical equilibrium. More interesting reactions occur in the second step, where cooling prevents reactions from reaching equilibrium. This leads to the production of TCS from SiCl2 and HCl, with efficiencies that depend on the conditions. Among the conditions investigated in this work, hydrogenation of a mixture of molar composition STC:H2 = 1:4 at 1473 K followed by cooling at a rate of −50.92 K cm–1 gave the highest conversion efficiency from STC into TCS.

show abstract

\begin{matrix} true \\ right {SiCl}_{4} + H_{2} \to {SiHCl}_{3} + HCl \end{matrix}

…”

Section: Introductionmentioning

confidence: 99%

Kinetics of the Conversion of Silicon Tetrachloride into Trichlorosilane Obtained through the Temperature Control along a Plug-Flow Reactor

Kunioshi

Moriyama

Fuwa

2015

Int. J. Chem. Kinet.

View full text Add to dashboard Cite

show abstract

“…The production of poly-Si through the chemical vapor deposition (CVD) process of TCS (SiHCl 3 ) is released the * Author to whom correspondence should be addressed. silicon tetrachloride (STC, SiCl 4 ) as a major byproduct, 4 as represented in reaction (1).…”

Section: Introductionmentioning

confidence: 99%

Hydrodechlorination of Silicon Tetrachloride to Trichlorosilane Over Ordered Mesoporous Carbon Catalysts: Effect of Pretreatment of Oxygen and Hydrochloric Acid

Dh¹,

Akhtar²,

Kim³

et al. 2016

j nanosci nanotechnol

View full text Add to dashboard Cite

This paper reports on the catalytic reaction for the conversion of silicon tetrachloride (STC) to trichlorosilane (TCS) over pretreated ordered mesoporous carbon (OMC) catalysts by oxygen (denoted as OMC-O2) and hydrochloric acid (denoted as OMC-HCl) at 300 degrees C under N2 atmosphere. The OMC-O2 shows significantly improved the surface area (1341.2 m2/g) and pore volume (1.65 cm3/g), which results in the highest conversion rate of 7.3% as compared to bare OMC (4.3%) and OMC-HCI (5.7%). It is found that the conversion rate of STC to TCS is proportional to the number of Si-O bond over OMC catalysts, which suggests that Si-O-C bond formation is crucial to the reaction as active sites. The O2 pretreatment seems to promote the generation of oxygenated species for the formation of Si-O-C.

show abstract

“…Prin urmare, dacã nu este depozitat în mod corespunzãtor, cauzeazã probleme de mediu foarte grave. Acest produs secundar a fost utilizat ca materie primã în anumite industrii, inclusiv cea producãtoare de silice arsã, organosiliciu sau triclorosilan [2][3][4]. Cu toate acestea, este greu de reutilizat ca urmare a cerinþelor sofisticate atât pentru procesul de purificare, cât ºi pentru cel de rectificare [5].…”

Section: Introducereunclassified

“…Therefore, it will cause very serious environmental problems without proper storage. This byproduct was normally designed as a raw material in some industries including fumed silica, organosilicon or trichlorosilane production [2][3][4]. However, it is hard to put the reuse into practice due to the sophisticated requirements from both purification and rectification process [5].…”

Section: Introductionmentioning

confidence: 99%

Performances of a Polysilicon Byproduct - Silicon Tetrachloride - on Swelling and Tanning Process

Teng¹,

Jian²,

Zhang³

et al. 2015

LFJ

View full text Add to dashboard Cite

Sodium silicate was prepared with a polysilicon byproduct-silicon tetrachloride. The swelling property of the sodium silicate was then investigated including proteoglycan removing ability, silicon absorptivity, relative weight and thickness increase. Meanwhile, a new process for cleaner wet blue preparation was carried out. Properties of the wet blue such as mechanical properties, thermal stability and surface color were tested following the standard method. Chrome distribution of the wet blue was investigated with an inductively coupled plasma (ICP). A scanning electron microscope (SEM) and a atomic force microscope (AFM) were also used to illustrate the histological features of the wet blue. Finally, environmental impact of both swelling and tanning process were studied through COD, chrome contention, total solids and turbidity test. The results showed that the swelling ability of these silicate agents was distinctly related with their modulus. The lower the modulus, the better the swelling ability was shown, in terms of a higher relative weight and thickness increase, a better proteoglycan removing and a better silicon absorptivity. The SEM analysis indicated fiber bundles were fully opened with this silicate agent. For the wet blue prepared by new method, an equally quality data was shown compared with control, meanwhile, a lighter surface color, less and equally distributed Cr(III) were detected. More compact fiber bundles were shown on the SEM images. No obvious damage was detected in tropocollagen fiber structures through AFM analysis. Furthermore, compared with the traditional process, COD, total solids and turbidity data of both swelling and tanning effluent provided a lower value. The results could provide a feasible way for silicon tetrachloride recycling, also provide valuable references for clean production of leather industry. KEY WORDS: Silicon tetrachloride; Sodium silicate; Swelling; Tanning; Leather PERFORMANÞELE UNUI PRODUS SECUNDAR DE SILICIU POLICRISTALIN-TETRACLORURÃ DE SILICIU-ASUPRA PROCESELOR DE GONFLARE ªI TÃBÃCIRE REZUMAT. Silicatul de sodiu a fost preparat utilizând un produs secundar al siliciului policristalin-tetraclorura de siliciu. Apoi, proprietatea de gonflare a silicaþilor de sodiu a fost studiatã, inclusiv capacitatea de eliminare a proteoglicanilor, absorbþia de siliciu, creºterea relativã a greutãþii ºi grosimii. În paralel, s-a dezvoltat un nou procedeu curat de tãbãcire a pieilor wet blue. Proprietãþile pieilor wet blue, cum ar fi proprietãþile mecanice, stabilitatea termicã ºi culoarea suprafeþei au fost testate utilizând metoda standard. Distribuþia cromului în pielea wet blue a fost investigatã utilizând plasmã cuplatã inductiv (ICP). Microscopia electronicã cu baleiaj (SEM) ºi microscopia de forþã atomicã (AFM) au fost, de asemenea, utilizate pentru a studia caracteristicile histologice ale pieilor wet blue. În cele din urmã, impactul asupra mediului atât al procesului de gonflare, cât ºi al celui de tãbãcire au fost studiate prin CCO, conþinutul de crom, solide totale...

show abstract

Preparation of trichlorosilane by plasma hydrogenation of silicon tetrachloride

Cited by 24 publications

References 5 publications

Kinetics of the Conversion of Silicon Tetrachloride into Trichlorosilane Obtained through the Temperature Control along a Plug-Flow Reactor

Kinetics of the Conversion of Silicon Tetrachloride into Trichlorosilane Obtained through the Temperature Control along a Plug-Flow Reactor

Hydrodechlorination of Silicon Tetrachloride to Trichlorosilane Over Ordered Mesoporous Carbon Catalysts: Effect of Pretreatment of Oxygen and Hydrochloric Acid

Performances of a Polysilicon Byproduct - Silicon Tetrachloride - on Swelling and Tanning Process

Contact Info

Product

Resources

About