Preparation of tetrahedral amorphous carbon films by filtered cathodic vacuum arc deposition

Polo, M.C.; Andújar, J.L.; Hart, Abarasi; Robertson, John; Milne, W. I.

doi:10.1016/s0925-9635(99)00339-8

Cited by 162 publications

(60 citation statements)

References 15 publications

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“…Introducing baffles along the filter and/or by constructing an "S" shaped filter can improve the filtering capabilities by a factor of 100. [37][38][39][40][41][42] Another advantage of FCVA is that, unlike IBD, the depositing plasma beam is neutral, and hence can deposit films onto insulating surfaces. The disadvantages of this method are the relative complexity, insufficient filtering ability for certain applications (e.g.…”

Section: Cathodic Arcmentioning

confidence: 99%

Diamond like carbon coatings for tribology: production techniques, characterisation methods and applications

Hainsworth¹,

Uhure²

2007

International Materials Reviews

181

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There are numerous types of surface coatings available to engineers in order to improve the friction and wear resistance of components. In order to successfully use these coatings in practice, it is important to understand the different types of coatings available, and the factors that control their mechanical and tribological properties. This paper will focus on the application of diamond-like carbon (DLC) coatings in tribological applications. Thus far, DLC coatings have found broad industrial application, particularly in optical and electronic areas. In tribological applications, DLC coatings are now being used successfully as coatings for ball bearings where they decrease the friction coefficient between the ball and race, in shaving applications where they increase the life of razor blades in wet shaving applications, and increasingly in automotive applications such as racing engines and standard production vehicles.The structure and mechanical properties of DLC coatings are dependent on the deposition method and the incorporation of additional elements such as nitrogen, hydrogen, silicon and metal dopants. These additional elements control the hardness of the resultant film, the level of residual stress and the tribological properties. As diamond-like carbon films increasingly become adopted for use in industry, it is important to review the factors that control their 2 of 42 DLC Reviewproperties, and thus, the ultimate performance of these coated components in practical tribological applications.

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Section: Cathodic Arcmentioning

confidence: 99%

Diamond like carbon coatings for tribology: production techniques, characterisation methods and applications

Hainsworth¹,

Uhure²

2007

International Materials Reviews

181

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“…The first was deposited using a single 293 bend Filtered Cathodic Vacuum arc (FCVA) system [8] with different biases. The second series of ta-C films was deposited at different bias on a S-Bend FCVA [10]. Two series of ta-C:H samples were obtained using an Electron Cyclotron Wave Resonance source with an acetylene plasma and an ion energy from 80 to 170 eV [11].…”

Section: Experimental Samplesmentioning

confidence: 99%

Density and sp³ Content in Diamond-Like Carbon Films by X-ray Reflectivity and Electron Energy Loss Spectroscopy

et al. 1999

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Grazing angle x-ray reflectivity (XRR) is used to study density, thickness, internal layering and roughness of a variety of carbon samples, with and without hydrogen and nitrogen. The bulk mass density of optimised tetrahedral amorphous carbon (ta-C) is 3.26 g/cm2, for which Electron Energy Loss Spectroscopy (EELS) found a sp3 fraction of 85%. Combining XRR and EELS we benchmark the dependence of sp3 fraction on density for hydrogen-free carbons. Hydrogenated ta-C (ta-C:H) deposited by electron cyclotron wave resonance (ECWR) reactor from acetylene gas, has a density of 2.35 g/cm3, 75% sp3 and ∼30% hydrogen. These data provide a similar validation for density and sp3 EELS data for hydrogenated DLCs. XRR can also reveal internal layering in films, and indeed less dense layers may be found at the surface or interface of ta-C films, but no such layers are found in ta-C:H films.

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“…The efficiency of the removal of macroparticles can also be improved using an S-bend magnetic filter, although it decreases the deposition rates due to reduced iontransport efficiency. [12][13][14][15][16][17] The pulsed mode of the plasma also allows better filtering of the macroparticle because the ions tend to be entrained in the plasma beam during the pulse but fall out of the plasma when the beam stops. [18][19][20][21][22] All these processes mentioned above are highly energetic processes, and the control of ion energy leads to the variation in the material properties.…”

Section: Introductionmentioning

confidence: 99%

Effect of high substrate bias and hydrogen and nitrogen incorporation on density of states and field-emission threshold in tetrahedral amorphous carbon films

Panwar

Khan

Satyanarayana³

et al. 2010

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

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This article reports the influence of substrate bias during growth and of hydrogen and nitrogen incorporation on density of states ͓N ͑E F ͔͒ and field-emission threshold ͑E turn-on ͒ in tetrahedral amorphous carbon ͑ta-C͒ films, deposited using an S-bend filtered cathodic vacuum arc process. The variation in negative substrate bias from Ϫ20 to Ϫ200 V was found to initially lead to a small decrease in N ͑E F ͒ and E turn-on , and a small increase in the emission current density ͑J͒ at 12.5 V / m in the case of as-grown ta-C films; beyond Ϫ200 V substrate bias there is a reversal in the trend. The values of N ͑E F ͒ = 1.3ϫ 10 17 cm −3 eV −1 , E turn-on = 8.3 V / m, and J = 6.19 mA/ cm 2 were observed at Ϫ200 V substrate bias. However at Ϫ300 V the properties were not very different from those at Ϫ200 V substrate bias and so with a view to use the higher energy, hydrogen and nitrogen incorporation studies were carried out in this condition. It was observed that there was further enhancement in properties with hydrogen and nitrogen incorporation. The best properties measured with in the range of hydrogen and nitrogen incorporation in the present study were N ͑E F ͒ = 8.0ϫ 10 16 cm −3 eV −1 , E turn-on = 7.6 V / m, and J = 23.7 mA/ cm 2 , respectively.

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Preparation of tetrahedral amorphous carbon films by filtered cathodic vacuum arc deposition

Cited by 162 publications

References 15 publications

Diamond like carbon coatings for tribology: production techniques, characterisation methods and applications

Diamond like carbon coatings for tribology: production techniques, characterisation methods and applications

Density and sp³ Content in Diamond-Like Carbon Films by X-ray Reflectivity and Electron Energy Loss Spectroscopy

Effect of high substrate bias and hydrogen and nitrogen incorporation on density of states and field-emission threshold in tetrahedral amorphous carbon films

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Preparation of tetrahedral amorphous carbon films by filtered cathodic vacuum arc deposition

Cited by 162 publications

References 15 publications

Diamond like carbon coatings for tribology: production techniques, characterisation methods and applications

Diamond like carbon coatings for tribology: production techniques, characterisation methods and applications

Density and sp3 Content in Diamond-Like Carbon Films by X-ray Reflectivity and Electron Energy Loss Spectroscopy

Effect of high substrate bias and hydrogen and nitrogen incorporation on density of states and field-emission threshold in tetrahedral amorphous carbon films

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Density and sp³ Content in Diamond-Like Carbon Films by X-ray Reflectivity and Electron Energy Loss Spectroscopy