2009
DOI: 10.1109/tasc.2009.2018189
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Preparation of Narrowed ${\rm YBa}_{2}{\rm Cu}_{3}{\rm O}_{7-{\rm x}}$ Nanobridges Down to 30 nm With Reduced Degradation

Abstract: We have established the new method of fabricating high-c YBa 2 Cu 3 O 7 x (YBCO) nanobridges with high reproducibility. Nanobridges ranging in 30-400 nm wide were formed by using electron beam lithography. An ultra thin film of 2-3 nm-thick insulative YBCO was deposited after nanobridge formation for recovering the damaged films occurred in the process.The critical current density c was approximately 620 MA cm 2 at 4.2 K in a width of 30 nm bridges, and increased by about two orders of magnitude in the differe… Show more

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Cited by 8 publications
(2 citation statements)
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References 11 publications
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“…The electron beam lithography conditions are described elsewhere. 12) The microfabrication process often degrades the quality of YBCO films, 13) and thus the characteristics of nanobridges made under the same conditions show poor reproducibility. To overcome this degradation, we employed intermittent etching, using a cycle of 30 s etching and 90 s cooling to reduce the heating of the substrate.…”
Section: Methodsmentioning
confidence: 99%
“…The electron beam lithography conditions are described elsewhere. 12) The microfabrication process often degrades the quality of YBCO films, 13) and thus the characteristics of nanobridges made under the same conditions show poor reproducibility. To overcome this degradation, we employed intermittent etching, using a cycle of 30 s etching and 90 s cooling to reduce the heating of the substrate.…”
Section: Methodsmentioning
confidence: 99%
“…Textiles techniques, such as dry spinning and solution spinning, yield YBCO fibers with relatively long lengths and large diameters in the micrometer range [13][14][15][16][17]. YBCO fibers with nanoscale diameters have been produced by focused ion beam [18], electron beam lithography [19], superlattice nanowire pattern transfer [20], and the sol-gel template process [21].…”
Section: Introductionmentioning
confidence: 99%