Preparation of high crystalline YBCO superconducting thin films by PLD

Abstract

In this paper, YBCO superconductor target material was prepared by solid phase synthesis and YBCO thin film with high crystallinity was prepared by pulsed laser deposition. The oxygen content of YBa2Cu3O7-x target can reach 6.8 by adopting pressure holding, in situ annealing and other measures during the sintering process, which belongs to the orthogonal superconducting phase. The effects of substrate inclination Angle and film thickness on crystal properties of YBCO superconducting thin films by pulsed laser deposition were investigated by using the prepared target material. The results show that the sample with a thickness of 500nm and a substrate tilt Angle of 15 degrees has the fewest pores, the densest films and the best crystallinity. It can produce a voltage response of 9mV in 9ms under the laser response of 1Mhz, and has good photoelectric response characteristics. This paper will have potential application value in the field of heat flow sensor, laser power meter and other functional devices.