Preparation of high crystalline YBCO superconducting thin films by PLD
Jiangshan Xu,
Hao Chen,
Zigang Zhou
Abstract:In this paper, YBCO superconductor target material was prepared by solid phase synthesis and YBCO thin film with high crystallinity was prepared by pulsed laser deposition. The oxygen content of YBa2Cu3O7-x target can reach 6.8 by adopting pressure holding, in situ annealing and other measures during the sintering process, which belongs to the orthogonal superconducting phase. The effects of substrate inclination Angle and film thickness on crystal properties of YBCO superconducting thin films by pulsed laser … Show more
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