2020
DOI: 10.1149/1945-7111/abcbb2
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Preparation of Flat and Smooth Copper Surface by Jet Electrochemical Machining and Electrochemical Polishing

Abstract: Ultra-flat and ultra-smooth copper (Cu) surfaces are widely used as optical mirrors, heat sinks, and substrates for functional material growth. Traditional polishing methods that rely on abrasive particles are easy to induce mechanical defects such as abrasives embedding and scratches on surfaces. A new stress-free machining process is proposed in this research to fabricate an ultra-flat and ultra-smooth Cu surface by combining jet electrochemical machining (Jet-ECM) and electrochemical polishing (ECP). With t… Show more

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Cited by 17 publications
(13 citation statements)
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References 52 publications
(88 reference statements)
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“…The chemicals used to prepare the liquid electrolyte are phosphoric acid, absolute ethanol, lactic acid, benzotriazole (BTA) and ammonium acetate. Table I shows the composition ratio 28,29 of each component of the electrolyte. The object of polishing is a 15 mm diameter Cu round block.…”
Section: Methodsmentioning
confidence: 99%
“…The chemicals used to prepare the liquid electrolyte are phosphoric acid, absolute ethanol, lactic acid, benzotriazole (BTA) and ammonium acetate. Table I shows the composition ratio 28,29 of each component of the electrolyte. The object of polishing is a 15 mm diameter Cu round block.…”
Section: Methodsmentioning
confidence: 99%
“…An electrochemical workstation (Gamry Instruments) with a three-electrode system, namely working electrode (maraging steel sample), counter electrode (platinum electrode), and reference electrode (Ag/AgCl electrode), is used for LSV. The voltage is swept between 10 to 0 V with a scan rate of 10 mV/s [15]. The potential must be swept in the cathodic direction to avoid any pitting of the electrode surface while achieving reproducible measurements [16].…”
Section: Electrochemical Analysismentioning
confidence: 99%
“…As a ultra-precision machining method, polishing is an important method to achieve nano-scale machining. Many scholars have also conducted various studies on polishing methods [18][19][20]. Due to the little research on the mechanism of UVAP of BK7 glass, the method is not widely used in actual processing.…”
Section: Introductionmentioning
confidence: 99%