1998
DOI: 10.1021/cm9805222
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Preparation of FeAPO-5 Molecular Sieve Thin Films and Application as a Capacitive Type Humidity Sensor

Abstract: Thin films of FeAPO-5 molecular sieves deposited on TiN-coated silicon wafers have been generated using pulsed laser ablation. The FeAPO-5 films were employed as the dielectric phase in a capacitive type chemical sensor. The FeAPO-5-based sensors exhibited significant changes in capacitance upon exposure to moisture. Interestingly, the sensor also responded to moisture from breathing which makes it useful not only as a potential humidity sensor but as a respiration monitoring device.

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Cited by 38 publications
(29 citation statements)
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“…[3] N R A report by Yamamoto and Schmid, describing the addition of a g-OMOM allylic stannane to several N-acyliminium intermediates from Hiemstra and Speckamp [4] (Scheme 3), prompted our examination of this alternative route to bamino alcohol derivatives. [5] In fact, addition of the racemic (Z)-g-oxygenated allylic stannanes 2 a and 2 b [1] to the Nacyliminium precursor 1, derived from isovaleraldehyde, [5] proceeded in high yield to afford the desired adducts (Table 1). Unfortunately, a mixture of syn and anti isomers 3 and 4 was obtained from these additions.…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…[3] N R A report by Yamamoto and Schmid, describing the addition of a g-OMOM allylic stannane to several N-acyliminium intermediates from Hiemstra and Speckamp [4] (Scheme 3), prompted our examination of this alternative route to bamino alcohol derivatives. [5] In fact, addition of the racemic (Z)-g-oxygenated allylic stannanes 2 a and 2 b [1] to the Nacyliminium precursor 1, derived from isovaleraldehyde, [5] proceeded in high yield to afford the desired adducts (Table 1). Unfortunately, a mixture of syn and anti isomers 3 and 4 was obtained from these additions.…”
Section: Methodsmentioning
confidence: 99%
“…The unique pulsed laser ablation of preformed supported zeolites can also be classified into this group. [5] In the latter group, preformed zeolite crystals are chemically attached on substrates by ionic or covalent bonding by use of appropriate organic additives. [6,7] For these isomers: d 6.95 ± 7.04 (m, PPh 3 ), 7.15 ± 7.28 (m,NC 9 H 6 NH), 7.82 ± 7.90 (m,PPh 3 ); 13 C and 11 B NMR spectra were not obtained due to low solubility; IR (Nujol): n Ä [cm À1 ] 1902vs (CO); 1 H NMR shows 1.0 equiv of C 6 H 6 present as solvent of crystallization; elemental analysis calcd for C 46 H 37 BCl 2 N 2 OOsP 2´C6 H 6 : C 59.72, H 4.14, N 2.67; found: C 59.87, H 4.22, N 2.64. 2 b: A solution of Bu 4 NI (110 mg, 0.298 mmol) in CH 2 Cl 2 (5 mL) was added to a suspension of 2 a (90 mg, 0.093 mmol) in CH 2 Cl 2 (15 mL), and the resultant mixture stirred for 40 min to give a dark red solution.…”
Section: Orientation-controlled Monolayer Assembly Of Zeolite Crystalmentioning
confidence: 99%
“…AlPO 4 -5 has routinely been chosen for aluminophosphate film growth due to the unique system of parallel channels, down the length of the elongated c-axis of the hexagonal crystal lattice with 0.73 nm diameter cylindrical pore openings. Supported oriented growth of the aluminophosphate AFI type has been reported by a variety of techniques: using surface-modified gold substrates [6], in situ hydrothermal growth on stainless steel supports [7], electric field seed crystal alignment on glass [8], laser ablation on coated silicon wafers [9], epitaxial growth from specific crystal basal faces [10], microwave growth on anodic alumina [11,12], manual assembly on various PVA-coated substrates [13], and in situ growth on bare porous α-Al 2 O 3 supports [14] or pre-coated with a thin chitosan layer [15]. We demonstrated an ability to control AFI film microstructure through seeded secondary and tertiary growth techniques on functionalized silicon substrates [16][17][18].…”
Section: Introductionmentioning
confidence: 99%
“…Figure 3a, corresponding to the spectra of AlPO-5, shows the peak at about 474 cm À1 which is assigned to the O-P-O bending vibration. Moreover, several peaks at about 714 and 1120 cm À1 were detected, which are attributed to the P-O stretching vibration of (PO 4 ) 3À , and stretching vibration of Al-O in combination with P-O, respectively (Chen and Jehng, 2003;Mu˜noz and Balkus, 1998). On the other hand, the FT-IR spectrum of the SAPO-5 adsorbent is presented in Figure 3b.…”
Section: Resultsmentioning
confidence: 98%