Molybdenum
disulfide (MoS2) is a representative transition
metal sulfide that is widely used in gas and biological detection,
energy storage, and integrated electronic devices due to its unique
optoelectrical and chemical characteristics. To advance toward the
miniaturization and on-chip integration of functional devices, it
is strategically important to develop a high-precision and cost-effective
method for the synthesis and integration of MoS2 patterns
and functional devices. Traditional methods require multiple steps
and time-consuming processes such as material synthesis, transfer,
and photolithography to fabricate MoS2 patterns at the
desired region on the substrate, significantly increasing the difficulty
of manufacturing micro/nanodevices. In this work, we propose a single-step
femtosecond laser-induced photochemical method which can realize the
fabrication of arbitrary two-dimensional edge-unsaturated MoS2 patterns with high efficiency in microscale. Based on this
method, MoS2 can be synthesized at a rate of 150 μm/s,
2 orders of magnitude faster than existing laser-based thermal decomposition
methods without sacrificing the resolution and quality. The morphology
and roughness of the MoS2 pattern can be controlled by
adjusting the laser parameters. Furthermore, the femtosecond laser
direct writing (FLDW) method was used to fabricate microscale MoS2-based gas detectors that can detect a variety of toxic gases
with high sensitivity up to 0.5 ppm at room temperature. This FLDW
method is not only applicable to the fabrication of high-precision
MoS2 patterns and integrated functional devices, it also
provides an effective route for the development of other micro/nanodevices
based on a broad range of transition metal sulfides and other functional
materials.