Preparation of Antimony Tin Oxide Thin Film Using Green Synthesized Nanoparticles by E-Beam Technique for NO2 Gas Sensing
Chaitra Chandraiah,
Hullekere Mahadevaiah Kalpana,
Challaghatta Muniyappa Ananda
et al.
Abstract:This work delves into the preparation of ATO thin films and their characterization, fabrication, and calibration of a NO2 gas sensor, as well as the development of the packaged sensor. ATO thin films were prepared by e-beam evaporation using green synthesized ATO nanomaterials on different substrates and annealed at 500 and 600 °C for one hour. The structural and morphological properties of the developed thin films were studied using scanning electron microscopy (SEM), transmission electron microscopy (TEM), a… Show more
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