Preparation of Anodic Aluminum Oxide Masks with Size-Controlled Pores for 2D Plasmonic Nanodot Arrays

Abstract

Anodic aluminum oxide (AAO) layers with nano-sized pores have been used as shadow masks for the fabrication of two-dimensional (2D) metal nanodot arrays (NDAs). However, the localized surface plasmon resonance (LSPR) of size-controlled NDAs fabricated using AAO masks has not been much studied. In this study, we report on the improved preparation method and utilization of an ultrathin AAO mask for the fabrication of 2D plasmonic metal NDAs. The greatest challenge in preparing an AAO mask is to control the pore diameter and to make it reproducible. AAO masks with size-controlled pores were reproducibly prepared using a two-step chemical wet etching method. Ag NDAs with different dot diameters (42, 60, and 80 nm) and Ag, Cu, and Au NDAs with dot a diameter of 80 ± 5 nm were fabricated on indium tin oxide glass substrates using AAO masks. The wavelengths corresponding to LSPR of 2D metal NDAs were investigated using ultraviolet–visible spectroscopy. Our results show that AAO masks with tunable pores can be used as shadow masks for the fabrication of 2D plasmonic NDAs.

High-Density Plasmonic Nanoparticle Arrays Deposited on Nanoporous Anodic Alumina Templates for Optical Sensor Applications

“…The NAA has been used for production of plasmonic nanoparticle arrays (NPA) for more than two decades [14]. Typically, NAA serves as a shadow mask for metal deposition [15,16,17,18] or pores are filled with metal electrochemically [9,15,19,20,21]. Some materials, for example germanium, can be filled in NAA pores using the supercritical fluid method [22].…”

All-Solution-Based, Low-to-Room-Temperature Fabrication of Position-Controlled Metal-Nanodot-Decorated Semiconductor Nanorods for Enhanced Optoelectronic Transducers

“…The scattering effect becomes the dominant factor in LSPR when the nanodot size exceeds 15 nm . Given the insulating nature of the underlying structure (ZNRs; metal oxide) and the spatial arrangement with nanodots, it is reasonable to infer that the LSPR effect will demonstrably depend on the nanodots’ structural properties, such as their position, size, and interdot spacing. − In light of these considerations, we anticipate significant differences in the LSPR effect based on Ag nanodot positioning. Follow-up studies are currently in progress to quantitatively analyze the scattering and LSPR characteristics across various configurations, including top–bottom–entire surface positions as well as different electrode structures.…”

Optical Device Based on a Nanopillar Array by the Pattern Transfer of an Anodic Aluminum Oxide Membrane

“…Nanostructured arrays with periodic variation of optical constants have been studied extensively and developed in different aspects to achieve various optical characteristics, such as wavelength/polarization/angle filtering, − optical field/phase manipulation, − and optoelectronic/optoacoustic conversion. , Owing to the development of nano-/microfabrication techniques such as e-beam lithography (EBL), focused ion beam (FIB) milling, and so on, complicated nanostructured devices with ultranarrow linewidths and ultrahigh depth-to-width ratios have been achievable in recent years. , However, the fabrication of these devices using such precision techniques is time-consuming and of high costs, which limits the research and applications of these nanostructured devices, especially for large-area circumstances. In recent years, the anodic aluminum oxide (AAO) membrane with regularly hexagonally latticed pores has aroused great interest for its simple and efficient preparation process, which has been investigated widely and developed in many areas including producing nanotubes, transferring patterns, − and observing quantum confinement effects . A systematic, comprehensive, and deep research on the fabrication of the AAO membrane has been carried out by Lee et al, and two-dimensional single-layer plasmonic arrays have been obtained through the AAO membrane to excite the localized surface plasmon resonance. , However, dielectric arrays using the AAO template with materials like oxides and sulfides are lacking.…”

“…In recent years, the anodic aluminum oxide (AAO) membrane with regularly hexagonally latticed pores has aroused great interest for its simple and efficient preparation process, which has been investigated widely and developed in many areas including producing nanotubes, transferring patterns, − and observing quantum confinement effects . A systematic, comprehensive, and deep research on the fabrication of the AAO membrane has been carried out by Lee et al, and two-dimensional single-layer plasmonic arrays have been obtained through the AAO membrane to excite the localized surface plasmon resonance. , However, dielectric arrays using the AAO template with materials like oxides and sulfides are lacking. In addition, the pattern transfer method combined with atomic layer deposition (ALD) is of great potential to produce embedded structures with various materials for numerous applications in fields of electronics, energy, and so forth, taking advantage of the unique deposition conformality of the ALD technique.…”

“…25 A systematic, comprehensive, and deep research on the fabrication of the AAO membrane has been carried out by Lee et al, 22 and twodimensional single-layer plasmonic arrays have been obtained through the AAO membrane to excite the localized surface plasmon resonance. 23,24 However, dielectric arrays using the AAO template with materials like oxides and sulfides are lacking. In addition, the pattern transfer method combined with atomic layer deposition (ALD) is of great potential to produce embedded structures with various materials for numerous applications in fields of electronics, energy, and so forth, taking advantage of the unique deposition conformality of the ALD technique.…”