2000
DOI: 10.1016/s0257-8972(00)00823-9
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Preparation of aluminum oxide films by ion beam assisted deposition

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Cited by 30 publications
(8 citation statements)
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“…corresponds to the metallic signal of the substrate (Al 0 2p ). The second peak located at 75.5 eV is growing with increasing exposure to oxygen and corresponds to oxidised aluminium (Al 3þ 2p ), in good agreement with previous observations on similar substrates [10,11,[15][16][17]. The O 1s spectrum shows the growth of one peak centered at a BE of 532.1 eV assigned to the anions of the growing oxide layer (O 2À 1s ).…”
Section: Xps Analysissupporting
confidence: 90%
“…corresponds to the metallic signal of the substrate (Al 0 2p ). The second peak located at 75.5 eV is growing with increasing exposure to oxygen and corresponds to oxidised aluminium (Al 3þ 2p ), in good agreement with previous observations on similar substrates [10,11,[15][16][17]. The O 1s spectrum shows the growth of one peak centered at a BE of 532.1 eV assigned to the anions of the growing oxide layer (O 2À 1s ).…”
Section: Xps Analysissupporting
confidence: 90%
“…Several papers only can be found in the literature, dealing with the formation of metastable aluminum oxides on unalloyed TiAl substrates [38,39]. The XPS analysis alone cannot be used for phase identification but the binding energy is expected to increase in the order from the more ionic bonding in g-Al 2 O 3 to the highly covalent bonding in a-Al 2 O 3 [40]. Accordingly, the position of the Al 2p peak in Fig.…”
Section: Discussionmentioning
confidence: 99%
“…The shift of BE maybe attribute to the formed unstoichiometric AlN x compounds. Another higher BE located at about 75.6 eV for samples T1-T3 belongs to Al O bonds in ␣-Al 2 O 3 but BE centered at 74.7 eV for sample T4 is contributed by Al O bonds in ␥-Al 2 O 3 which has more ionic bonding nature [24]. In addition, the surface composition ratio between Ti atoms and Al atoms is calculated from the survey spectrums, it can be found that Ti/Al ratio increases from 0.77 to 1.40, which indicates the enrichment of Ti at the surface with increasing N 2 /Ar ratio.…”
Section: Morphologymentioning
confidence: 92%