Preparation of alumina/silica core-shell abrasives and their CMP behavior

Lei, Hong; Zhang, Pengzhen

doi:10.1016/j.apsusc.2007.04.079

Cited by 73 publications

(30 citation statements)

References 21 publications

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“…Disperse fine equiaxed α -Al 2 O 3 nanoparticles (NPs) are important materials for applications such as cancer therapy1, abrasive polishing2 and nanocomposite materials3. Disperse fine equiaxed α -Al 2 O 3 NPs with narrow size distribution are essential raw materials for sintering nanocrystalline α -Al 2 O 3 ceramic which may exhibit low temperature ductility like nanocrystalline CaF 2 and TiO 2 ceramics with an average grain size of 8 nm showing large plastic deformations at 80 and 180 °C respectively4 and nanocrystalline TiO 2 ceramic with an average grain size of 40 nm showing a large true strain of −0.6 at 800 °C5.…”

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confidence: 99%

Disperse fine equiaxed alpha alumina nanoparticles with narrow size distribution synthesised by selective corrosion and coagulation separation

et al. 2015

Sci Rep

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Disperse fine equiaxed α-Al2O3 nanoparticles with narrow size distribution are important materials in nanotechnology and nanomaterials, but syntheses of disperse fine equiaxed α-Al2O3 nanoparticles usually result in fine γ-Al2O3 nanoparticles or large α-Al2O3 nanoparticles larger than 15 nm. α-Al2O3 has a higher surface energy than γ-Al2O3 and becomes thermodynamically not stable with respect to γ-Al2O3 at specific surface areas larger than 100 m2/g (at sizes smaller than 15 nm for spherical particles) at room temperature. So disperse fine equiaxed α-Al2O3 nanoparticles smaller than 15 nm with narrow size distribution are extremely difficult to synthesise. Here we show the successful synthesis of disperse fine equiaxed α-Al2O3 nanoparticles with average sizes below 10 nm and narrow size distribution by selective corrosion and refined fractionated coagulation separation. An almost fully dense nanocrystalline α-Al2O3 ceramic with a relative density of 99.5% and an average grain size of 60 nm can be sintered from disperse fine equiaxed α-Al2O3 nanoparticles with narrow size distribution.

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confidence: 99%

Disperse fine equiaxed alpha alumina nanoparticles with narrow size distribution synthesised by selective corrosion and coagulation separation

et al. 2015

Sci Rep

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“…The MRR decreased since the silica core had no direct contact with the sapphire CMP. In our previous work, silica/ceria nano composite abrasives [20] and alumina/silica core-shell abrasives [21] were prepared for hard disk CMP. Both showed high planarization efficiency and better planarization quality than pure silica abrasives under the same conditions.…”

Section: Introductionmentioning

confidence: 99%

Preparation of Ag2O modified silica abrasives and their chemical mechanical polishing performances on sapphire

2017

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Abstract:The chemical mechanical polishing (CMP) process has become a widely accepted global planarization technology. The abrasive material is one of the key elements in CMP. In the presented paper, an Ag-doped colloidal SiO 2 abrasive is synthesized by a seed-induced growth method. It is characterized by time-of-flight secondary ion mass spectroscopy and scanning electron microscopy to analyze the composition and morphology. The CMP performance of the Ag-doped colloidal silica abrasives on sapphire substrates is investigated. Experiment results show the material removal rate (MRR) of Ag-doped colloidal silica abrasives is obviously higher than that of pure colloidal silica abrasives under the same testing conditions. The surfaces that are polished by composite colloidal abrasives exhibit lower surface roughness (Ra) than those polished by pure colloidal silica abrasives. Furthermore, the acting mechanism of Ag-doped colloidal SiO 2 composite abrasives in sapphire CMP is analyzed by X-ray photoelectron spectroscopy, and analytical results show that element Ag forms Ag 2 O which acts as a catalyst to promote the chemical effect in CMP and leads to the increasing of MRR.

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“…Recently, silica and metal-coated core-shell composite particles have turned to the focus for the preparation of nanocomposites due to its unique properties [1][2][3][4][5] and potential applications in catalysts, sensors, colloidal entities with unique optical properties, and substrates for surface-enhanced Raman scattering [6][7][8][9]. However, there are few reports about silica nanocomposites grafted with helical polymers.…”

Section: Introductionmentioning

confidence: 98%

Preparation, characterization and infrared emissivity study of helical polyurethane@SiO2 core-shell composite

Wang

Zhou

Yao

et al. 2009

Applied Surface Science

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Preparation of alumina/silica core-shell abrasives and their CMP behavior

Cited by 73 publications

References 21 publications

Disperse fine equiaxed alpha alumina nanoparticles with narrow size distribution synthesised by selective corrosion and coagulation separation

Disperse fine equiaxed alpha alumina nanoparticles with narrow size distribution synthesised by selective corrosion and coagulation separation

Preparation of Ag2O modified silica abrasives and their chemical mechanical polishing performances on sapphire

Preparation, characterization and infrared emissivity study of helical polyurethane@SiO2 core-shell composite

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