Preparation of a stable silica membrane by a counter diffusion chemical vapor deposition method

Nomura, Mikihiro; Ono, Kiyomi; Gopalakrishnan, Suraj; Sugawara, Takashi; Nakao, Shin Ichi

doi:10.1016/j.memsci.2004.11.008

Cited by 144 publications

(87 citation statements)

References 24 publications

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“…E act increased with increasing the deposition temperatures. E act was 10 kJ mol -1 at 600°C of the TMMOS deposition, while E act was 22 kJ mol -1 for the TMOS deposition at 600°C (Nomura et al, 2005a). These differences must be the effect of methyl groups of the silica precursors.…”

Section: Tmmos Depositionmentioning

confidence: 90%

“…Uniform membranes can be obtained by the counter diffusion method by this deposition mechanism. The group of the Tokyo University reported that hydrothermally stable silica membrane was prepared by the counter diffusion CVD method at 600°C using tetramethoxysilane (TMOS) and oxygen as precursors (Nomura et al, 2005a(Nomura et al, , 2005b(Nomura et al, , 2006a(Nomura et al, , 2006b). However, the effects of silica precursors on the membrane properties are not clear.…”

Section: Introductionmentioning

confidence: 99%

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Pore Size Control of a Molecular Sieve Silica Membrane Prepared by a Counter Diffusion CVD Method

Nomura

Nagayo

Monma

2007

J. Chem. Eng. Japan

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A molecular sieve silica membrane was successfully prepared by using a counter diffusion chemical vapor deposition method. Effects of silica precursors on permeation properties through the silica membranes were investigated. Five types of silica alkoxides (tetramethyorthosilicate (TMOS), methyltrimethoxysilane (MTMOS), trimethylmethoxysilane (TMMOS), propyltrimethoxysilane (PrTMOS) and phenyltrimethoxysilane (PhTMOS)) were employed for the silica precursors.

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Section: Tmmos Depositionmentioning

confidence: 90%

Section: Introductionmentioning

confidence: 99%

Pore Size Control of a Molecular Sieve Silica Membrane Prepared by a Counter Diffusion CVD Method

Nomura

Nagayo

Monma

2007

J. Chem. Eng. Japan

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“…Several techniques have been widely developed to effectively control the pore size of silica derived membranes, including sol-gel methods [24][25][26][27][28][29][30][31] and chemical vapour deposition (CVD) [32][33][34][35]. Although remarkable progress in gas separation applications have been reported using both methods, to date only silica membranes derived via sol-gel processes have been investigated for desalination applications.…”

Section: Features Of Silica Based Membranes For Desalinationmentioning

confidence: 99%

Microporous Silica Based Membranes for Desalination

Elma

Yacou

Wang

et al. 2012

Water

100

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Abstract:This review provides a global overview of microporous silica based membranes for desalination via pervaporation with a focus on membrane synthesis and processing, transport mechanisms and current state of the art membrane performance. Most importantly, the recent development and novel concepts for improving the hydro-stability and separating performance of silica membranes for desalination are critically examined. Research into silica based membranes for desalination has focussed on three primary methods for improving the hydro-stability. These include incorporating carbon templates into the microporous silica both as surfactants and hybrid organic-inorganic structures and incorporation of metal oxide nanoparticles into the silica matrix. The literature examined identified that only metal oxide silica membranes have demonstrated high salt rejections under a variety of feed concentrations, reasonable fluxes and unaltered performance over long-term operation. As this is an embryonic field of research several target areas for researchers were discussed including further improvement of the membrane materials, but also regarding the necessity of integrating waste or solar heat sources into the final process design to ensure cost competitiveness with conventional reverse osmosis processes.

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“…In our previous studies we developed hydrogen-selective silica membranes with tetramethoxysilane (TMOS) as silica precursor, and reported that the membranes showed a higher hydrogen permeance and hydrogen separation factor at 773-873 K 46) . Based on the permeation behaviors of several gas species, the membrane prepared with TMOS was estimated to have a pore size of around 0.3 nm.…”

Section: Pore Size Control In the Preparation Of Silicamentioning

confidence: 99%

Development of Membrane Reactors for Dehydrogenating Organic Chemical Hydrides to Supply High-purity Hydrogen

Akamatsu

Nakao

2011

J. Jpn. Petrol. Inst.

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This review describes recent developments in the field of membrane reactors for obtaining high-purity hydrogen from organic chemical hydrides using hydrogen-selective amorphous silica membranes prepared by chemical vapor deposition. The application of such membrane reactors for hydrogen production reactions enables us to achieve higher conversion because of equilibrium shifts and to obtain high-purity hydrogen in one step, thus accomplishing an effective hydrogen supply. The most important issue in developing membrane reactors is the selection and preparation of appropriate hydrogen-selective silica membranes for each dehydrogenation reaction. Initially, the pore-size control method was developed by changing chemical structures of silica precursors in the chemical vapor deposition step. Using these membranes, membrane reactors for dehydrogenating cyclohexane or methylcyclohexane were developed and equilibrium shifts were achieved under various reaction conditions. High-purity hydrogen ( 99.9 %) was stably attained by operating the membrane reactors with neither carrier gas nor sweep gas.

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Preparation of a stable silica membrane by a counter diffusion chemical vapor deposition method

Cited by 144 publications

References 24 publications

Pore Size Control of a Molecular Sieve Silica Membrane Prepared by a Counter Diffusion CVD Method

Pore Size Control of a Molecular Sieve Silica Membrane Prepared by a Counter Diffusion CVD Method

Microporous Silica Based Membranes for Desalination

Development of Membrane Reactors for Dehydrogenating Organic Chemical Hydrides to Supply High-purity Hydrogen

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