Preparation of 0.055BaZrO₃–0.935(K0.45Na0.5Li0.05)NbO₃–0.01(Bi0.5Na0.5)TiO₃ piezoelectric thin films from precursor solution by Pechini method

Abstract

Lead-free piezoelectric thin films of 0.055BaZrO 3 -0.935(K 0:45 Na 0:5 Li 0:05 )NbO 3 -0.01(Bi 0:5 Na 0:5 )TiO 3 (BZ-KNLN-BNT) were fabricated on (100)-LaNiO 3 /SiO 2 /Si substrates. The Pechini (polymeric precursor) method was carried out to prepare the complicated multi-component precursor solution. This method was suited for controlling the complex components accurately. The films crystallized at 700 C showed a (100) pc -oriented perovskite structure, whose grain size was about 200 nm and thickness was about 700 nm. The Curie temperature T c of the films was 292 C that was near to that of the bulk ceramics. The preparation method used in this work provided a possibility for the application of multi-component lead-free piezoelectric films.

Effect of substrate material to the properties of screen-printed lead free (Bi0.5Na0.5)TiO3-based thick films

“…Consequently, exploration of high-performance lead-free piezoelectric materials has continued to increase in recent years. [5][6][7] For example, perovskite-based materials, including BaTiO 3 -based, [8][9][10][11][12][13][14] (Bi, Na)TiO 3 -based, [15][16][17][18][19] and (K, Na)NbO 3 -based 5,[20][21][22][23] materials, have been widely reported as substitutes for PZT-based materials. However, the inferior piezoelectric properties of these lead-free materials have prevented their practical application.…”