“…WO3 could be elaborated by different techniques such as: chemical vapor deposition [10,13], spray pyrolysis [14], sol gel [15], electrodeposition [16] and atomic layer deposition (ALD) [17]. In the literature, WO3 used in gas sensors has been reported in different forms as nanowires [18][19], nanoparticles [20], thin films [21] permitting the detection of different gases: nitrogen dioxide (NO2) [20][21], hydrogen sulfide (H2S) [22], ozone (O3) [23], hydrogen [24], ethanol [24]. The WO3-based sensor response at an operating temperature is depending strongly on the substrate [21] and the microstructure features [25].…”