Preparation and properties of amorphous phosphorus nitride prepared in a low-pressure plasma

Investigation of the local structure of LiPON thin films to better understand the role of nitrogen on their performance

“…The first one, labeled N1, is bound to two phosphorus atoms (-N=), while the second one N2 corresponds to a nitrogen atom linked to three phosphorus atoms (-Nb). The energy difference of 1.6 eV observed between the two peaks is consistent with the results obtained for a P 3 N 5 H x phosphorus nitride [12] in which these two nitrogen chemical environments also exist. For the latter, the reported values of binding energies are respectively 397.0 eV and 398.6 eV.…”

Room temperature route to phosphorus nitride hollow spheres

“…2 shows the FTIR spectra of the P 3 N 5 sample. The absorption peaks at 496, 918, 1218 cm À1 indicates the presence of single and double phosphorus-nitride bonds, which is in agreement with the reported [7,13,14]. The absorptions between 2500 and 3600 cm À1 correspond to O-H bending vibration and O-H stretching vibration of H 2 O.…”

“…XPS spectra of the P 3 N 5 sample. and the N1s peak at 399.3 eV indicate P 3 N 5 , in good agreement with those in the literature [13,15]. The atomic ratio of P:N is 1:1.60, close to that of P 3 N 5 (1:1.67).…”

Chemical and microstructural modifications in LiPON thin films exposed to atmospheric humidity

“…These changes make it easier for the lithium ion to break its bond with oxygen and easier movement through channels. Also, a study of amorphous phosphorous nitrides by Veprek et al on nitrogen incorporation as doubly (−N =) and more distorted triply coordinated (−N b) states to phosphate glasses revealed greater ionic conductivity with increased presence of (−N b) states [1,21,22].…”