Preparation and patterning of HfO2 film via sol–gel method and resistive switching effect of Pt/HfO2/LaNiO3

Liu, Xiaoqin; Liu, Jianbo; Li, Wei; Sheng, Qingqing; He, Yeming; Wang, Yangyang

doi:10.1016/j.mssp.2024.108463

Materials Science in Semiconductor Processing

2024

DOI: 10.1016/j.mssp.2024.108463

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Preparation and patterning of HfO2 film via sol–gel method and resistive switching effect of Pt/HfO2/LaNiO3

Xiaoqin Liu,

Jianbo Liu,

Wei Li

et al.

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Preparation and patterning of HfO2 film via sol–gel method and resistive switching effect of Pt/HfO2/LaNiO3

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