The role of stoichiometry and growth temperature in the preferential nucleation of material phases in the Li-Nb-O family are explored yielding an empirical growth phase diagram. It is shown that while single parameter variation often produces multi-phase films, combining substrate temperature control with the previously published lithium flux limited growth allows the repeatable growth of high quality single crystalline films of many different oxide phases. Higher temperatures (800-1050°C) than normally used in MBE were necessary to achieve high quality materials. At these temperatures the desorption of surface species is shown to play an important role in film composition. Using this method single phase films of NbO, NbO2, LiNbO2, Li3NbO4, LiNbO3, and LiNb3O8 have been achieved in the same growth system, all on c-plane sapphire. Finally, the future of these films in functional oxide heterostructures is briefly discussed.The lithium niobium oxide family consists of conducting, semiconducting, and insulating materials across a wide resistivity and bandgap range. Figure 1 lists the resistivity of a few materials in the system as a function of niobium valence, ranging from conducting niobium to insulating lithium niobite (LiNbO3). These materials span 22 orders of magnitude in resistivity with bandgaps from IR to UV [1][2][3][4][5][6][7][8]. Oxides in general have many desirable multifunctional properties, for example; piezoelectric, pyroelectric, and ferroelectric effects which can exist in a single material such as lithium niobate [9,10]. Lithium niobite (LiNbO2), a suboxide of the same family, is currently the focus of multiple research areas. LiNbO2 is used as a memristor for neuromorphic applications, a battery cathode material showing potential for high rate capability and long term cycle stability, and is also studied for unique optical properties [11][12][13]. NbO2 acts as a digital memristor, a device with discrete on and off resistance states. NbO2 is currently used in memory, neuristor circuitry, and relaxation oscillator circuitry [14][15][16]. The Li-Nb-O material family also includes other ceramics of various dielectric constants used in a variety of applications including battery electrodes, microwave frequency dielectrics, phosphors, photocatalysts for water reduction, and hysteretic MIM tunnel diodes or "memdiodes" (Li3NbO4, LiNb3O8, and Nb2O5) [17][18][19][20][21][22]5,23,24].This fundamental understanding will allow new devices and heterostructures to be explored including but not limited to neuromorphic computing elements, strain enhanced sensors and MEMS, high K dielectrics, tunable dielectrics, ferroelectric superlattices, and ferroelectric switching transistors with switchable enhanced channel conductance.With this motivation in mind the materials in the Li-Nb-O family are analyzed by crystal quality and surface morphology for use in future heterostructure devices. In this architecture it is shown that LiNbO2, LiNbO3, and NbO2 are the multi-functional active materials while niobium can be used...