Preparation and characterization of x-ray mirrors with three single layers of a-C, B<sub>4</sub>C, and Ni onto two 820-mm long Si substrate

Störmer, M.; Siewert, Frank; Buchheim, Jana; Pilz, Alexander; Kuhlmann, Marion; Ploenjes, Elke; Tiedtke, K.

doi:10.1117/12.2063017

Cited by 1 publication

(1 citation statement)

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“…The homogeneity, reproducibility and run-to-run stability of the coating process was determined in previous investigations, described in the references. [5][6][7] For the 2 ODL mirrors considered in this study the coating thickness of B 4 C is 50 nm. After the deposition, the mirrors are measured again with at European XFEL with the same interferometer, method and lab set-up.…”

Section: Measurements After Coatingmentioning

confidence: 99%

Metrology and characterization of two optical delay line mirrors before and after B4C coating at European XFEL

Freijo-Martin,

Schmidtchen,

Vannoni

et al. 2023

Advances in Metrology for X-Ray and EUV Optics X

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The European XFEL generates extremely short and intense x-ray laser pulses, with high coherence and diffractionlimited divergence. It generates ultrashort x-ray flashes, 27 000 times per second, with a brilliance that is a billion times higher than that of the best conventional x-ray radiation sources. Due to these extreme beam characteristics, the x-ray mirrors to transport and focus the beam need to be coated to protect them against beam damage. The surface quality of these mirrors before the coating is in the order of 2 nm peak-to-valley and 200 km radius on average. The ultra-flat x-ray mirrors of ultimate precision are important in order to preserve the quality of the beam delivered to the experiments and the coating must not compromise the surface quality. This manuscript presents a preliminary study of the surface quality of 2 mirrors that will be part of the Optical Delay Line (ODL) before and after coating using Fizeau and White Light Interferometry.

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Section: Measurements After Coatingmentioning

confidence: 99%

Metrology and characterization of two optical delay line mirrors before and after B4C coating at European XFEL

Freijo-Martin,

Schmidtchen,

Vannoni

et al. 2023

Advances in Metrology for X-Ray and EUV Optics X

View full text Add to dashboard Cite

show abstract

Preparation and characterization of x-ray mirrors with three single layers of a-C, B₄C, and Ni onto two 820-mm long Si substrate

Cited by 1 publication

References 10 publications

Metrology and characterization of two optical delay line mirrors before and after B4C coating at European XFEL

Metrology and characterization of two optical delay line mirrors before and after B4C coating at European XFEL

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Preparation and characterization of x-ray mirrors with three single layers of a-C, B4C, and Ni onto two 820-mm long Si substrate

Cited by 1 publication

References 10 publications

Metrology and characterization of two optical delay line mirrors before and after B4C coating at European XFEL

Metrology and characterization of two optical delay line mirrors before and after B4C coating at European XFEL

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Preparation and characterization of x-ray mirrors with three single layers of a-C, B₄C, and Ni onto two 820-mm long Si substrate