2009
DOI: 10.1380/ejssnt.2009.557
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Preparation and Characterization of Ultraclean H:Si(111)-(1*1) Surfaces Studied by HREELS, AFM and STM-STS

Abstract: We review a wet chemical process to prepare the high quality hydrogen-terminated Si( 111)-(1×1) surface and show that the two key issues for the high reproducibility are the etching time and the oxygen in the etching solution. We add ammonium sulfite to remove the oxygen according to the previous report [Appl. Surf. Sci. 130, 146 (1998)]. To elucidate the optimal etching time, the vibrational properties and the surface morphology are investigated by high-resolution electron-energy-loss spectroscopy (HREELS), … Show more

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“…Vicinal surfaces of Si(111) wafers were tilted toward the [112̄] direction (the step direction [11̄0]), and Si(111) wafers used in our experiments have average interstep distances of 350, 100, 10, and 4.5 nm (off-cut angle 0.05°, 0.5°, 1.8°, 4.0°, respectively) (Figure ). The H−Si(111) substrates were prepared according to the recipe reported by Suto et al , After the removal of organic contaminations by ultrasonic cleaning with solfine and acetone, substrates were oxidized in a solution of H 2 SO 4 /H 2 O 2 = 3:1 for 2−10 min and etched with NH 4 F for 5−21 min.
1 A schematic illustration of an off-cut H−Si(111) surface and incident directions of a Pn molecular beam (arrows a and b).
…”
Section: Methodsmentioning
confidence: 99%
“…Vicinal surfaces of Si(111) wafers were tilted toward the [112̄] direction (the step direction [11̄0]), and Si(111) wafers used in our experiments have average interstep distances of 350, 100, 10, and 4.5 nm (off-cut angle 0.05°, 0.5°, 1.8°, 4.0°, respectively) (Figure ). The H−Si(111) substrates were prepared according to the recipe reported by Suto et al , After the removal of organic contaminations by ultrasonic cleaning with solfine and acetone, substrates were oxidized in a solution of H 2 SO 4 /H 2 O 2 = 3:1 for 2−10 min and etched with NH 4 F for 5−21 min.
1 A schematic illustration of an off-cut H−Si(111) surface and incident directions of a Pn molecular beam (arrows a and b).
…”
Section: Methodsmentioning
confidence: 99%