Preparation and characterization of nano-structured tungsten carbide crystallites

Abstract

With WCl6, C2H2 and H2 reaction system and Ar work gas, WC nanocrystallites were prepared by plasma chemical vapor deposition(PCVD). The properties of WCl6 and WC particles including chemical composition, morphology, size and structure of crystal phase were characterized by Transmission Electron Microscopy (TEM) and X-ray Diffraction (XRD). Results show that the most particles of WC in the obtained nanocrystallites are spherical and the mean particle size is about 50nm.