Preparation and Characterization of Ir Coating on WC Ceramic by Double Glow Plasma

Zhang, Zhongwei; Zhang, Xu; Wang, Jinming; Wu, Wangping; Chen, Zhaofeng

doi:10.1007/s11665-012-0133-3

Cited by 9 publications

(2 citation statements)

References 27 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

Section: Introductionmentioning

confidence: 99%

“…Physical vapor deposition (PVD) methods, including double-discharge plasma deposition [21], magnetron sputtering in radio-frequency discharge [3,22], and direct-current discharge [23] are used for deposition of Ir coatings most widely to date. For stable operation of deposition facility in a double-discharge plasma, it is necessary to set a relatively high negative potential not only of the sputtered Ir cathode (typical values are 800-900 V) but also of the substrates (300-400 V) [21,24]. The energy of ions bombarding the coating in such devices is usually determined by the conditions of stable discharge combustion, and the value of the ion current density directly depends on other operating parameters (electrode potentials, gas pressure).…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Effect of ion assistance parameters on the properties of Ir coatings

Kamenetskikh¹,

Гаврилов²

2022

8th International Congress on Energy Fluxes and Radiation Effects

View full text Add to dashboard Cite

Iridium coatings were deposited on Ni substrates by magnetron sputtering with ion assistance in the plasma of a low-energy electron beam. The influence of the parameters of the ion flux on the surface of the growing coating on the microstructure, the intrinsic stresses, and the adhesion of the coating is investigated. It is shown that deposition of a coating with a dense microstructure at a low homologous temperature (~0.15) is provided under the optimal ratio of the ion current density to Ir flux ~0.5 and the ion energy ~150 eV. The coatings deposited in the optimal mode are characterized by microdistortions of the crystal lattice of ~0.9% and have a predominant crystallite orientation (111), which is a favorable factor for providing corrosion protection. A low level of intrinsic stresses (~0.5 GPa) and a high adhesion strength of the coatings (the value of the critical load at nanoindentation is more than 3000 mN) have been achieved.

show abstract