“…In the glow discharge process, a chemical reaction is initiated in the gas phase, which creates a glow discharge of the reactant gas, and consequently the source material is deposited on the substrate. 48,51,52 In the physical route, various deposition techniques include electron-beam vacuum evaporation, [53][54][55][56][57][58][59] resistive heating-based thermal evaporation, [60][61][62] sputtering, [63][64][65][66][67][68][69] molecular beam epitaxy (MBE), 70,71 pulsed laser deposition (PLD) 72,73 and close-space sublimation (CSS). [74][75][76][77][78][79] The thermal evaporation technique is a vapor deposition technique following the physical route for the deposition of thin films.…”