Preparation and Characterization of Boron Carbon Nitride Films on High Speed Steel Surface

Abstract

In this paper, we deposited BCN films on high speed steel (HSS) substrate by magnetron sputtering. The structure and composition of the films were analyzed by X-ray diffraction (XRD) and Fourier transform infrared spectroscopy (FTIR). The tribological properties of the films was studied by ball-on-disc tribological test. Results show that BCN films have a certain antifriction effect, which is influenced by RF target power and substrate bias.