Prepapation of CSD-PZT thick films with different methods

Abstract

PbZr,Ti,~,O,(PZT) thick films were prepared on PtiTilSiOJSi substrate with over lum-thickness by means of using chemical solution deposition(CSD). Two different sol-gel solutions were prepared with high viscosity, The conventjonal solution used just added propylene glycol and, the modified solution was derived from propyiene glycol. We evaluated various properties of thick films prepared based on both solutions, including microstructure, crystal orientation and electric properties. The films derived from modified solution showed preferred (100) orientation which could be a consequence of the precursor difference of PZT solution. Under 550 C, PZT (100) orientation could be obtained from X-ray diffraction patterns. We could compared the results-Various properties of PZT films derived by 13-propanediol system just used as a solvent-with other papers' method. Most of all, with the modified solution, we could decreased the thickness of thermally oxidized silicon layer and the solution was a stable stock sol-gel solution

Influence of Solvents on the Microstructure and Dielectric Properties of Ba0.5Sr0.5TiO3 Thin Films Prepared by a Diol-Based Sol−Gel Process

“…For the synthesis of PZT thick films (3 μm) by sol−gel, the solvent nature (diols, such as propylene glycol, ethylene glycol, and 1,3-propanediol) was reported to influence the film quality. In this work, Lee et al observed that PZT films derived from 1,3-propanediol showed a preferred (100) orientation, that the presence of second phases was avoided, and that the final properties were improved. Glycols were also reported as being very effective as drying agents for the preparation of uniform and dense films, improving the cracking behavior of gel BST films .…”

Chemical synthesis of complex oxide thin films and freestanding membranes

“…For example, using multideposition few millimeter thick single phase complex oxide films can be obtained. 26,27 On the other hand, by means of ink-jet printing, micrometer-lateral size pitches of 1 mm thick films can be prepared by a single deposition. 28 Remarkably, the flexibility that solution processing offers in terms of chemical formulation enables the preparation of more complex systems such as nanocomposites.…”

Unilamellar liposomes covalently coupled on silica gel for liquid chromatography

“…Immobilized liposomes have been successfully used as chromatographic stationary phases to study drug-membrane partitioning [4,5,6,7,8], protein purification [9,10], protein-membrane interaction [11], and bioaffinity measurements [12]. They have also received increased attention in recent years as a powerful tool to study solutemembrane interactions.…”