Preliminary investigations into SU-8 as a material for integrated all-optical microwave filters

Curtis, P.D.; Iezekiel, Stavros; Miles, R.E.; Pescod, C.R.

doi:10.1109/hfpsc.2000.874093

Cited by 5 publications

(4 citation statements)

References 9 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Cured SU-8 polymer is known to be a physically strong material and at the same time, demonstrates excellent chemical and thermal stability. It has also been used as structural material in some microdevices and microsystems, especially in microfluidic systems (Williams and Wang 2004;Lee et al 2003;Konaka and Allen 1996;Jeong and Wang 2004;Curtis et al 2001;Thorpe et al 1998).…”

Section: Introductionmentioning

confidence: 96%

Design and fabrication of a SU-8 based electrostatic microactuator

2006

View full text Add to dashboard Cite

Comb-drive microactuator is widely used in MEMS devices and traditionally is made of silicon as structural material using silicon-based fabrication technology. Recent development in UV lithography of SU-8 has made it possible to fabricate the ultra high aspect ratio microstructures with excellent sidewall quality. In this paper, we report a low cost alternative to the silicon-based comb drive by using cured SU-8 polymer as structural material. The microactuator was designed to have a integrated structure without assembly or bonding. A unique integration fabrication process was successfully developed based on UV lithography of SU-8 and selectively metallizing SU-8 polymer structures. Preliminary experimental results have proved the feasibility of the microactuator and the fabrication technology.

show abstract

Section: Introductionmentioning

confidence: 96%

Design and fabrication of a SU-8 based electrostatic microactuator

2006

View full text Add to dashboard Cite

show abstract

“…SU-8 has mostly been used in two ways: as a thick resist for UV lithography to fabricate plating moulds for UV-LIGA microfabrication and as the structural material for microsystems based on cured SU-8, especially in microfluidic systems (Jeong and Wang 2004;Curtis et al 2001;Thorpe et al 1998), because of its excellent chemical and thermal stability.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of comb-drive micro-actuators based on UV lithography of SU-8 and electroless plating technique

Dai¹,

Wang²

2008

Microsyst Technol

View full text Add to dashboard Cite

Comb-drive microactuators are widely used in MEMS devices. Most of the comb-drive microactuators reported in MEMS field are made using fabrication technology with silicon as the structural material. Recent progress in ultra violet (UV) lithography of SU-8 has made it feasible to fabricate ultra high aspect ratio microstructures with excellent sidewall quality. In this paper, a research work on fabrication and metallization of high aspect ratio SU-8 polymer comb-drive microactuators was reported. The fabrication process combined multi-step and multi-layer UV lithography of SU-8 on a silicon substrate and copper electroless plating to selectively metallize the SU-8 microstructure. The selective electroless plating was achieved by using UV modification of the SU-8 microstructures and the careful control of the exposure dosage. Preliminary experimental results have proved the feasibility of the microactuator and the fabrication technology.

show abstract

“…Cured SU-8 has been mainly used in two ways: one is to use it as thick resist material for fabricating plating moulds in UV-LIGA microfabrication; another is to use cured SU-8 polymer as structural material for microsystems, especially in microfluidic systems (Lee et al 2003;Ling and Lian 2000;Jeong and Wang 2004;Curtis et al 2001;Thorpe et al 1998). In the situations in which cured SU-8 polymer itself is used for microstructures and devices, the adhesion strength between the cured SU-8 polymer and the substrate may be of significant importance to the quality and functionality of the final devices.…”

Section: Introductionmentioning

confidence: 99%

A quantitative study on the adhesion property of cured SU-8 on various metallic surfaces

2005

View full text Add to dashboard Cite

SU-8 has received wide attention in recent years because of its application in the fabrication of high aspect ratio microstructures and devices. This negative resist is known for its excellent lithography properties using ultraviolet light source. As the microfabrication technology based on UV-lithography of SU-8 finds wide applications, a good understanding and characterization of cured SU-8 polymer on various substrate materials are therefore very important. A good adhesion on various substrate materials is essential to both the fabrication process and to the functionality of any final products that have cured SU-8 as part of the structural material. There are very limited studies reported in this important area in the literature. This paper presents a theoretical and experimental work to quantitatively study the adhesion properties of cured SU-8 on some of the most commonly used metallic surface materials. The adhesion strengths of cured SU-8 samples on Au, Ti, Cu, Cr, and Ni coated glass substrates were measured following ASTM-C633 standard. A detailed analysis of the experimental results was also provided based on the atomic structures and electron configurations of the respective metals.

show abstract

Preliminary investigations into SU-8 as a material for integrated all-optical microwave filters

Cited by 5 publications

References 9 publications

Design and fabrication of a SU-8 based electrostatic microactuator

Design and fabrication of a SU-8 based electrostatic microactuator

Fabrication of comb-drive micro-actuators based on UV lithography of SU-8 and electroless plating technique

A quantitative study on the adhesion property of cured SU-8 on various metallic surfaces

Contact Info

Product

Resources

About