2016
DOI: 10.1515/msp-2016-0010
|View full text |Cite
|
Sign up to set email alerts
|

Preliminary comparison of three processes of AlN oxidation: dry, wet and mixed ones

Abstract: Three methods of AlN layers oxidation: dry, wet and mixed (wet with oxygen) were compared. Some physical parameters of oxidized thin films of aluminum nitride (AlN) layers grown on silicon Si(1 1 1) were investigated by means Energy-Dispersive X-ray Spectroscopy (EDS) and Spectroscopic Ellipsometry (SE). Three series of the thermal oxidations processes were carried out at 1012°C in pure nitrogen as carrying gas and various gas ambients: (a) dry oxidation with oxygen, (b) wet oxidation with water steam and (c) … Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1

Citation Types

0
4
0

Year Published

2018
2018
2024
2024

Publication Types

Select...
4

Relationship

0
4

Authors

Journals

citations
Cited by 4 publications
(4 citation statements)
references
References 11 publications
0
4
0
Order By: Relevance
“…The origin of the air stability can begin to be understood by considering if the n ‐type doped states will participate in the reduction of water or the oxidation of wet oxygen 36,55,56. If the pH of the surrounding environment is 7 with negligible over potentials, the doped n ‐type organic material is stable toward reduction of water when the work function is located between 3.7 and 5.0 eV.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…The origin of the air stability can begin to be understood by considering if the n ‐type doped states will participate in the reduction of water or the oxidation of wet oxygen 36,55,56. If the pH of the surrounding environment is 7 with negligible over potentials, the doped n ‐type organic material is stable toward reduction of water when the work function is located between 3.7 and 5.0 eV.…”
Section: Resultsmentioning
confidence: 99%
“…The origin of the air stability can begin to be understood by considering if the n-type doped states will participate in the reduction of water or the oxidation of wet oxygen. [36,55,56] If the pH of the surrounding environment is 7 with negligible over potentials, the doped n-type organic material is stable toward reduction of water when the work function is located between 3.7 and 5.0 eV. When the work function is located deeper than 5.0 eV, doped n-type organic materials will be further reduced by water with oxygen, but this should not be a problem since it corresponds to further electron doping.…”
Section: Air Stabilitymentioning
confidence: 99%
“…Aluminum nitride coating, deposited by chemical vapor deposition at 1373 K was selected for its high thermal conductivity, low thermal expansion coefficient, high temperature stability and its ability to develop stable alumina scales at high temperature [11]. Al2O3 layer which is formed during high temperature air exposure can modify underlying substrate properties [12][13][14][15] [11,[16][17]. Along with low fabrication costs, these coatings also present self-healing effects if the protective surface oxide layer fails [18].…”
Section: Introductionmentioning
confidence: 99%
“…Therefore, the oxidation of AlN ceramics remains the major challenges for its practical applications. Numerous efforts have been made to investigate the oxidation of AlN with aid of a series of experimental observations. The oxidation of AlN ceramics under two different oxidizing atmospheres was studied by Hou et al, which indicates that the oxidation rate of AlN strongly depends on temperature and oxygen partial pressure. It is widely believed that the main oxidation products of AlN are Al 2 O 3 and N 2 . , The formation and escape of N 2 lead to produce a porous oxide layer on the surface of AlN, which promotes the infiltration of oxygen molecules.…”
Section: Introductionmentioning
confidence: 99%