Predominant role of fatigue crack evolution and tribo-chemistry on tribological behavior of Si-DLC film under different relative humidity

Li, Xia; Luo, Yi; Li, Jingbo; Cao, Xueqian; Wang, Liguo; Zhang, Guangan; Luo, Zhen

doi:10.1016/j.triboint.2023.108326

Cited by 5 publications

(3 citation statements)

References 39 publications

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“…In addition to metal doping, non-metals such as Si [13][14][15], F [16], and N [17] are also used to prepare different types of DLC films, which typically exhibit excellent mechanical [18], tribological [19], and chemical properties [1]. Hydrogenated DLC has poor thermal stability and optical properties due to the presence of CH bonds.…”

Section: Introductionmentioning

confidence: 99%

Effect of Gas Flow Rate and Ratio on Structure and Properties of Nitrogen-Doped Diamond-like Carbon Films

Ma,

Wang,

et al. 2024

Applied Sciences

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Diamond-like carbon (DLC) has attracted much attention due to its unique properties such as high chemical inertness, optical transparency, and high biocompatibility. In this study, the total gas flow rate was kept constant, while the ratio of reactive gases was varied to deposit nitrogen-doped diamond-like carbon thin films on glass substrates using radiofrequency plasma-enhanced chemical vapor deposition. The effects of the gas flow ratio on the composition, microstructure, surface morphology, and optical properties of the thin films were investigated through extended deposition times. It was found that with an increase in the nitrogen-to-methane gas flow ratio, the film surface became smoother and more compact. The maximum transmittance in the visible range reached 90%, and the highest and lowest transmittance in the same ultraviolet wavelength region differed by up to 25.62% among several sample groups. The optical bandgap decreased from 3.58 eV to 3.46 eV, contrary to the trend of the sp2 fraction variation. Compared with other studies, this study considered the preparation of nitrogen-doped diamondoids using a chemical vapor deposition method with a lesser total gas flow rate passed into it, which provides practical data reference value for the preparation of N-DLC.

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Section: Introductionmentioning

confidence: 99%

Effect of Gas Flow Rate and Ratio on Structure and Properties of Nitrogen-Doped Diamond-like Carbon Films

Ma,

Wang,

et al. 2024

Applied Sciences

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“…Diamond-like carbon (DLC) coatings have attracted considerable attention due to their unique combination of desirable properties, including a high hardness, low friction, chemical inertness and high wear resistance [1][2][3]. Recently, many elements, including metallic elements (Cr [4], Ti [5], W [6] et al) and non-metallic elements (Si [7], O [8], N [9] et al), have been doped into DLC to improve the coating properties, such as the residual stress, toughness, wettability, electrical properties and tribological behavior. According to the chemical property and content of the doping element, the doping atoms can bond with carbon (carbide elements, such as Cr, Ti, W, N and Si) and exist as a part of the carbon matrix, or can create a two-dimensional array of nano-clusters (carbide nanoparticles, metallic precipitated phase et al) within the DLC matrix or an atomic-scale composite dissolving in the DLC matrix [4][5][6][7][8][9].…”

Section: Introductionmentioning

confidence: 99%

“…Recently, many elements, including metallic elements (Cr [4], Ti [5], W [6] et al) and non-metallic elements (Si [7], O [8], N [9] et al), have been doped into DLC to improve the coating properties, such as the residual stress, toughness, wettability, electrical properties and tribological behavior. According to the chemical property and content of the doping element, the doping atoms can bond with carbon (carbide elements, such as Cr, Ti, W, N and Si) and exist as a part of the carbon matrix, or can create a two-dimensional array of nano-clusters (carbide nanoparticles, metallic precipitated phase et al) within the DLC matrix or an atomic-scale composite dissolving in the DLC matrix [4][5][6][7][8][9]. It is clear that the chemical state and existing form of the doping atoms would pronouncedly influence the properties of the DLC coatings.…”

Section: Introductionmentioning

confidence: 99%

Structure and Property of Diamond-like Carbon Coating with Si and O Co-Doping Deposited by Reactive Magnetron Sputtering

Dai

Wang

2023

J. Compos. Sci.

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In this paper, diamond-like carbon (DLC) coatings with Si and O co-doping (Si/O-DLC) were deposited by reactive magnetron sputtering using a gas mixture of C2H2, O2 and Ar to sputter a silicon/graphite splicing target. The O content in the Si/O-DLC coatings was controlled by tuning the O2 flux in the gas mixture. The composition, chemical bond structure, mechanical properties and tribological behavior of the coatings were investigated by X-ray photoelectron spectroscopy, Fourier infrared spectrometer, Raman spectroscopy, nanoindentation, a scratch tester and a ball-on-disk tribometer. The electrical resistivity of the Si/O-DLC coatings was also studied using the four-point probe method. The results show that the doping O tends to bond with Si to form a silicon–oxygen compound, causing a decrease in the sp3 content as well as the hardness of the coatings. The tribological performance of the coatings can be improved due to the formation of the silicon–oxygen compound, which can effectively reduce the friction coefficient. In addition, the insulating silicon–oxygen compound is doped into the C-C network structure, significantly improving the surface resistivity of the DLC coating with a low sp3 content. The Si/O-DLC coatings with good mechanical properties, tribological performance and electrical insulation properties might be used as protection and insulation layers for microelectronics.

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Study on impact wear and damage mechanisms of DLC films on TC4 and 9Cr18 alloys

Mou,

Liu,

Zhu

et al. 2024

Diamond and Related Materials

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Predominant role of fatigue crack evolution and tribo-chemistry on tribological behavior of Si-DLC film under different relative humidity

Cited by 5 publications

References 39 publications

Effect of Gas Flow Rate and Ratio on Structure and Properties of Nitrogen-Doped Diamond-like Carbon Films

Effect of Gas Flow Rate and Ratio on Structure and Properties of Nitrogen-Doped Diamond-like Carbon Films

Structure and Property of Diamond-like Carbon Coating with Si and O Co-Doping Deposited by Reactive Magnetron Sputtering

Study on impact wear and damage mechanisms of DLC films on TC4 and 9Cr18 alloys

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