Prediction of Phase Composition and Process Resilience in Plasma‐Assisted Hetero‐Aggregate Synthesis using a Machine‐Learning Model with Multivariate Output
Yuanqing Lu,
Timur Fazletdinov,
Zhiwen Pan
et al.
Abstract:The synthesis of nanoscale particles and particle aggregates from liquid or gaseous precursors is affected by a variety of trade‐off relations, for example, in terms of product composition, yield, or energy efficiency. Machine‐supported process evaluation and learning (ML) of these relations enables optimization strategies for advanced material processing. Such a workflow is demonstrated on the example of plasma‐assisted aerosol deposition (PAAD) of alumina powders. Depending on processing conditions, these po… Show more
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