Predicting visibility of interference fringes in X-ray grating interferometry

Yan, Aimin; Wu, Xizeng; Liu, Hong

doi:10.1364/oe.24.015927

Cited by 18 publications

(15 citation statements)

References 35 publications

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“…The striking CNR advantage enables discrimination of tiny density differences of soft biomedical tissues and organs. Since the sharpness of an image is essential to observation of biological fine structures, the SR of a tomographic image obtained by the GXI‐based CT, were estimated from a criterion based the full widths at half maximum (FWHM) of the line spread function (LSF) curves, which were derived from the SRF fitted with an error function by means of a least‐squares fit. In this way, the image SR was determined by the FWHM of the LSF function.…”

Section: Discussionmentioning

confidence: 99%

Quantitative evaluation on 3D fetus morphology via X‐ray grating based imaging technique

Liu

Xing

et al. 2019

Int J Imaging Syst Tech

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Synchrotron‐based X‐ray phase sensitive micro‐tomography techniques enable to visualize detailed three‐dimensional (3D) insight into nondestructive inner‐structure of biomedical samples. Different phase sensitive mechanisms have been employed for discrimination of tissue's tiny density variations in biomedical research. We effectively visualized and analyzed the phase‐contrast experimental results of X‐ray grating‐based imaging, based on grating interferometry with phase stepping, by using transgenic mouse fetus. We quantitatively measured and evaluated the contrast‐to‐noise ratio or the mass density resolution, spatial resolution, radiation dose, and figure of merit of X‐ray grating‐based imaging technique in biomedical research respectively. Moreover, the complex coherent degrees of light source were duly taken into account in the analysis of spatial resolution. In addition, the mass density distribution of soft biomedical specimens can be estimated using our presented method preliminarily. For most soft tissue and organ observation, this work provides explicit guidelines to help future synchrotron users obtain the quantitative image information, suitable for their specific biomedical research.

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Section: Discussionmentioning

confidence: 99%

Quantitative evaluation on 3D fetus morphology via X‐ray grating based imaging technique

Liu

Xing

et al. 2019

Int J Imaging Syst Tech

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“…[49] The visibility depends on grating's phase shift, X-ray spectrum, spatial coherence degree of X-ray illumination, and system geometry, such as the phase grating to detector distance. [49] We measured an average X-ray fringe visibility of 17.5% with π/2 phase shift, which is comparable with the values achieved in absorbing gratings fabricated by conventional DRIE followed by Au electroplating. [38] The visibility map (visibility at each X-ray camera pixel) and differential phase contrast and scattering images of the sample consisting of a grain ear are shown in Figure 9.…”

Section: X-ray Gratings Phase Interferometrymentioning

confidence: 99%

High‐Aspect‐Ratio Grating Microfabrication by Platinum‐Assisted Chemical Etching and Gold Electroplating

et al. 2020

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Diffractive optics play a key role in hard X‐rays imaging for which many scientific, technological, and biomedical applications exist. Herein, high‐aspect‐ratio microfabrication of gratings for X‐ray interferometry is demonstrated using Pt as a catalyst for the metal assisted chemical etching of Si in a solution of HF and H2O2. The Pt layer is thermally treated to realize a porous catalyst layer that stabilizes the etching of a pattern with a pitch size from 4.8 to 20 μm in the direction perpendicular to the <100> Si substrate and an aspect ratio up to 60:1. The superior etching performance of Pt as a catalyst and its stability in a solution with high HF content are reported in direct comparison with the Au catalyst for the same grating parameters. The Si structure is then used as a template for filling with Au, as a high absorbing X‐ray material. The Pt catalyst layer is used as a conductive seed for Au electroplating. The quality of the overall process is assessed by obtaining a visibility map using 30 μm‐thick Au grating in an X‐ray interferometric setup at 20 keV.

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“…The visibility depends on the degree of spatial coherence of the illumination as well as its spectrum, on the system geometry and on grating's pitch and depth. The interference fringe visibility is a common figure of merit for the design of X-ray gratings interferometers [101]. This is because the formation of high-modulation fringe pattern is a prerequisite for robust grating interferometry.…”

Section: G0 G1 G2mentioning

confidence: 99%

Microfabrication of X-ray Optics by Metal Assisted Chemical Etching: A Review

Romano

Stampanoni

2020

Micromachines

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High-aspect-ratio silicon micro- and nanostructures are technologically relevant in several applications, such as microelectronics, microelectromechanical systems, sensors, thermoelectric materials, battery anodes, solar cells, photonic devices, and X-ray optics. Microfabrication is usually achieved by dry-etch with reactive ions and KOH based wet-etch, metal assisted chemical etching (MacEtch) is emerging as a new etching technique that allows huge aspect ratio for feature size in the nanoscale. To date, a specialized review of MacEtch that considers both the fundamentals and X-ray optics applications is missing in the literature. This review aims to provide a comprehensive summary including: (i) fundamental mechanism; (ii) basics and roles to perform uniform etching in direction perpendicular to the <100> Si substrate; (iii) several examples of X-ray optics fabricated by MacEtch such as line gratings, circular gratings array, Fresnel zone plates, and other X-ray lenses; (iv) materials and methods for a full fabrication of absorbing gratings and the application in X-ray grating based interferometry; and (v) future perspectives of X-ray optics fabrication. The review provides researchers and engineers with an extensive and updated understanding of the principles and applications of MacEtch as a new technology for X-ray optics fabrication.

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Predicting visibility of interference fringes in X-ray grating interferometry

Cited by 18 publications

References 35 publications

Quantitative evaluation on 3D fetus morphology via X‐ray grating based imaging technique

Quantitative evaluation on 3D fetus morphology via X‐ray grating based imaging technique

High‐Aspect‐Ratio Grating Microfabrication by Platinum‐Assisted Chemical Etching and Gold Electroplating

Microfabrication of X-ray Optics by Metal Assisted Chemical Etching: A Review

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