We have designed, fabricated, and characterized magnetostatic wave (MSW) resonators on a chip. The resonators are fabricated by patterning single-crystal yttrium iron garnet (YIG) film on a gadolinium gallium garnet (GGG) substrate and excited by loop-inductor transducers. We achieved this technology breakthrough by developing a YIG film etching process and fabricating thick aluminum coplanar waveguide (CPW) inductor loop around each resonator to individually address and excite MSWs. At 4.77 GHz, the 0.68-mm 2 resonator achieves a quality factor (Q) > 5000 with a bias field of 987 Oe. We also demonstrate YIG resonator tuning by more than one octave from 3.63 to 7.63 GHz by applying an in-plane external magnetic field. The measured quality factor of the resonator is consistently over 3000 above 4 GHz. The micromachining technology enables the fabrication of multiple singleand two-port YIG resonators on the same chip with all resonators demonstrating octave tunability and high Q. Index Terms-Magnetostatic wave (MSW), micromachining, resonator, spin wave, yttrium iron garnet (YIG). I. INTRODUCTION T HE advent of 5G and the desire for large bandwidth has brought the 3-30-GHz band into prominence [1]. RF MEMS piezoelectric film bulk acoustic resonators (FBARs) [2], the gold standard of 4G filter technology, do not scale favorably with 5G RF communication [3] because of reduced thickness, high metal resistance, and challenging lithography. On the other hand, electromagnetic (EM) wave-based resonators, such as microstrip lines, 3-D micromachined coaxial lines, and evanescent cavities [4], [5], are too large for chip-scale integration. Magnetostatic wave (MSW) resonators and filters are a promising technology to fill this gap [6]. MSWs exist in