2019
DOI: 10.1038/s41467-018-08038-4
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Precision ultrasound sensing on a chip

Abstract: Ultrasound sensors have wide applications across science and technology. However, improved sensitivity is required for both miniaturisation and increased spatial resolution. Here, we introduce cavity optomechanical ultrasound sensing, where dual optical and mechanical resonances enhance the ultrasound signal. We achieve noise equivalent pressures of 8–300 μPa Hz−1/2 at kilohertz to megahertz frequencies in a microscale silicon-chip-based sensor with >120 dB dynamic range. The sensitivity far exceeds similar se… Show more

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Cited by 118 publications
(74 citation statements)
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References 50 publications
(72 reference statements)
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“…We achieve this by developing a microscale photonic platform to initialize vortex clusters in two-dimensional helium-4 on a silicon chip, confine them, and image their spatial distribution over time. Our experiments characterize vortex distributions via their interactions with resonant sound waves, leveraging ultraprecise sensing methods from cavity optomechanics [30][31][32][33]. Microscale confinement greatly enhances the vortex-sound interactions,…”
mentioning
confidence: 99%
“…We achieve this by developing a microscale photonic platform to initialize vortex clusters in two-dimensional helium-4 on a silicon chip, confine them, and image their spatial distribution over time. Our experiments characterize vortex distributions via their interactions with resonant sound waves, leveraging ultraprecise sensing methods from cavity optomechanics [30][31][32][33]. Microscale confinement greatly enhances the vortex-sound interactions,…”
mentioning
confidence: 99%
“…The tapered fiber is slightly tightened up to stable the MBL and avoid intensive stress. By beating with MBL's native resonance, we can coherently pick up those acoustical signals in a more sensitive way with sensitivity ∼267 µPa Hz −1/2 (details in the supplement), comparable or better performed than other similar optomechanical devices [36]. Here multiple resonances are observed from the MBL's spectrum response during frequency sweeping in Figure 4b.…”
Section: Acoustic Wave Sensing In Mblmentioning
confidence: 76%
“…The resonant enhancement of both optical and mechanical response in a cavity optomechanical system [1,2] has enabled precision sensors [3] of displacement [4,5], force [6], mass [7], acceleration [8,9], ultrasound [10], and magnetic fields [11][12][13][14][15][16]. Cavity optomechanical magnetometers are particulary attractive, promising stateof-the-art sensitivity without the need for cryogenics, with only microwatt power consumption [11][12][13][14]16], and with silicon chip based fabrication offering scalability [15].…”
Section: Introductionmentioning
confidence: 99%