Precision positioning control of a long-stroke stage employing multiple switching control

Wang, Fu-Cheng; Lü, Junfu; Su, Wei-Jiun; Yen, Jia‐Yush

doi:10.1007/s00542-020-04759-z

Cited by 3 publications

(4 citation statements)

References 22 publications

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“…We applied loop-shaping techniques (see Figure 2 of [10]), to design robust controllers for the PZT stage. The principles of loop shaping are:…”

Section: Appendix a Robust Control Design For The Pzt Stagementioning

confidence: 99%

“…The idea was extended in [9] by switching two robust controllers based on the prediction of future responses. Wang et al [10] further proposed multiple-switch robust control, which considered multiple control sequences and obtained more performance benefits than were attained with a single switching control. In this paper, we propose an iterative algorithm to tune the mechanism parameters for further improvement of system performance, because the parameters of the multiple control mechanism can significantly influence system performance and computing loads.…”

Section: Introductionmentioning

confidence: 99%

“…Yamaguchi et al [12] proposed initial value compensation to control a hard disk driver. Because control reduction can reduce the initial value problems, Wang et al [10] simplified high-order robust controllers into robust PID controllers that could achieve similar responses to the original controllers. In this paper, we further reduce the robust controllers to robust proportional-integral (PI) controllers, thereby reducing the computing loads in the multiple switching control mechanism.…”

Section: Introductionmentioning

confidence: 99%

“…Fang et al [17] developed a modified Bouc-Wen model and designed a fuzzy PID control with an inverse model feedforward compensator for a PZT stage. Wang et al [10] proposed an automatic switching control for a PZT stage. Zhang et al [18] designed an autonomous switching control to suppress the vibration of a doublebeam system employing piezoelectric shunt damping.…”

Section: Introductionmentioning

confidence: 99%

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Iterative Parameter Optimization for Multiple Switching Control Applied to a Precision Stage for Microfabrication

et al. 2021

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This paper proposes an iteration procedure to derive optimal parameters for a multiple switching control architecture. Control design is usually a compromise between various performance requirements; therefore, switching between multiple controllers that achieve a particular performance under different conditions can potentially improve the overall system behavior. In this paper, we consider a control-switching mechanism that can automatically switch controllers based on the prediction of future responses, and we develop an iteration procedure that can optimize the mechanism parameters, such as the number of controllers and the prediction horizon. We then implement the proposed mechanism in a long-stroke precision stage, and demonstrate the effectiveness of switching robust control with simulations and experiments. Lastly, we integrate the stage with a two-photon polymerization system to fabricate microlenses. The optical properties confirm that the proposed iterative parameter optimization procedure is effective in improving the performance of microfabrication employing multiple switching control.

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“…We applied loop-shaping techniques (see Figure 2 of [10]), to design robust controllers for the PZT stage. The principles of loop shaping are:…”

Section: Appendix a Robust Control Design For The Pzt Stagementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Iterative Parameter Optimization for Multiple Switching Control Applied to a Precision Stage for Microfabrication

et al. 2021

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Study on the transient response to the point-to-point motion controls on a dual-axes air-bearing planar stage

Kuo

Hsu

Hsieh

et al. 2020

Int J Adv Manuf Technol

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Design and Analysis of a Long-Stroke and High-Precision Positioning System for Scanning Beam Interference Lithography

Chen,

Li,

et al. 2023

Electronics

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A macro–micro dual-drive positioning system was developed for Scanning Beam Interference Lithography (SBIL) which uses a dual-frequency laser interferometer as the position reference and exhibits the characteristics of long travel, heavy load, and high accuracy. The macro-motion system adopts a friction-driven structure and a feedforward PID control algorithm, and the stroke can reach 1800 mm. The micro-motion system adopts a flexible hinge–plus-PZT driving method and a PID control algorithm based on neural networks, which achieves sufficient positioning accuracy of this system at the nanometer level. An optical-path-sealing system was used to reduce the measurement noise of the dual-frequency laser interferometer. The static stability of the positioning system, the stepping capacity of the macro-motion system, the stepping capacity of the micro-motion system, and the positioning accuracy of the system were tested and analyzed. Additionally, the sources and effects of errors during the motion process were assessed in detail. Finally, the experimental results show that the workbench can locate at the nanoscale within the full range of travel, which can satisfy the SBIL exposure requirement.

show abstract

Precision positioning control of a long-stroke stage employing multiple switching control

Cited by 3 publications

References 22 publications

Iterative Parameter Optimization for Multiple Switching Control Applied to a Precision Stage for Microfabrication

Iterative Parameter Optimization for Multiple Switching Control Applied to a Precision Stage for Microfabrication

Study on the transient response to the point-to-point motion controls on a dual-axes air-bearing planar stage

Design and Analysis of a Long-Stroke and High-Precision Positioning System for Scanning Beam Interference Lithography

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