1st Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology. Proceedings (Cat. No.
DOI: 10.1109/mmb.2000.893766
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Precision micromotor for surgery

Abstract: A silicon-based piezoelectric linear stepper motor has been designed and fabricated. The motor is based on an inertial drive concept derived from sequential electrostatic clamping and unclamping of a piezoelectric bar measuring 38.1 x 6.36 x 0.787 mm. The piezoeIectric micromotor has been constructed and tested for precision surgical applications. The measured performance is dependent on the operating conditions selected. Representative performance i s a speed of 1.2 "/s against a 3.0 N load. The motor is limi… Show more

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Cited by 12 publications
(5 citation statements)
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“…MEMS devices are small in size and can be batch fabricated at low cost, thereby having a competitive advantage over other devices. One of the fastest growth areas is incorporating MEMS devices on surgical tools which facilitate the surgeon by providing realtime force feedback, measuring tissue density and temperature, and providing a more precise method for tissue cutting and extraction and thus improving surgical outcomes [1][2][3][4][5][6][7]. To use the MEMS devices for surgical and bio-medical applications, there are fabrication challenges apart from integrating it with electronics, signal processing, calibration and device packaging [4,5].…”
Section: Introductionmentioning
confidence: 99%
“…MEMS devices are small in size and can be batch fabricated at low cost, thereby having a competitive advantage over other devices. One of the fastest growth areas is incorporating MEMS devices on surgical tools which facilitate the surgeon by providing realtime force feedback, measuring tissue density and temperature, and providing a more precise method for tissue cutting and extraction and thus improving surgical outcomes [1][2][3][4][5][6][7]. To use the MEMS devices for surgical and bio-medical applications, there are fabrication challenges apart from integrating it with electronics, signal processing, calibration and device packaging [4,5].…”
Section: Introductionmentioning
confidence: 99%
“…This microactuator will act as the secondary drives in HDD by reducing the skew angle during the disk operation [6]. Furthermore, the microactuator also can be used in the surgery in medical field [16]. The microactuator is using in the micro-mirror devices of the laser phononicrosurgery which acts as the manipulator of the laser source.…”
Section: Development Of Micro Electro Mechanical Systemmentioning
confidence: 99%
“…Serious postoperative vision problems may occur if the lens is inserted incorrectly and needs to be removed. Precision piezoelectric micromotors have been developed for intraocular delivery of replacement lenses after cataract removal [7]. These inchworm actuators use a glider and clamp arrangement to generate large forces over small displacements.…”
Section: E Eye Surgerymentioning
confidence: 99%