Precision fabrication of EUVL programmed defects with helium ion beam patterning

Lee, Chien-Lin; Cai, Jia-Syun; Chien, Shih‐Chang; Tsai, Kuen-Yu; Li, Jia-Han; Lee, Chao-Te

doi:10.1117/1.jmm.20.2.023001

J. Micro/Nanopattern. Mats. Metro.

2021

DOI: 10.1117/1.jmm.20.2.023001

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Precision fabrication of EUVL programmed defects with helium ion beam patterning

Chien-Lin Lee

Jia-Syun Cai

Shih‐Chang Chien

et al.

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Precision fabrication of EUVL programmed defects with helium ion beam patterning

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