2020
DOI: 10.3390/mi12010017
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Precision EDM of Micron-Scale Diameter Hole Array Using in-Process Wire Electro-Discharge Grinding High-Aspect-Ratio Microelectrodes

Abstract: Micro-electrical discharge machining (micro-EDM) is a good candidate for processing micro-hole arrays, which are critical features of micro-electro-mechanical systems (MEMS), diesel injector nozzles, inkjet printheads and turbine blades, etc. In this study, the wire vibration of the wire electro-discharge grinding (WEDG) system has been analyzed theoretically, and, accordingly, an improved WEDG method was developed to fabricate micron-scale diameter and high-aspect-ratio microelectrodes for the in-process micr… Show more

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Cited by 9 publications
(4 citation statements)
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“…Micro-electrical discharge machining (micro-EDM), as a non-conventional material removal method, is widely applied in the processing of high-hardness and difficult-tomachine materials [1,2], especially for tiny parts [3][4][5]. Die-sinking micro-EDM, compared to micro-EDM milling [6], offers advantages such as high efficiency and absence of complex electrode compensation.…”
Section: Introductionmentioning
confidence: 99%
“…Micro-electrical discharge machining (micro-EDM), as a non-conventional material removal method, is widely applied in the processing of high-hardness and difficult-tomachine materials [1,2], especially for tiny parts [3][4][5]. Die-sinking micro-EDM, compared to micro-EDM milling [6], offers advantages such as high efficiency and absence of complex electrode compensation.…”
Section: Introductionmentioning
confidence: 99%
“…The subtractive micro and mesoscale metal manufacturing (subtractive-M 4 ) processes generally produce the features and components from the given materials one by one, and include mechanical machining (milling [7], turning, drilling [8], etc. ), laser beam machining [9], focused ion beam machining [10,11], electro-discharge machining [12], and chemical/electrochemical machining [13,14], etc. The additive-M 4 processes produce the objects by depositing materials typically layer by layer and include electrochemical deposition (ECD) [15], electroless plating [16,17], focused-ion beam induced deposition (FIBID) [18], laser-chemical vapor deposition (LCVD) [19], etc.…”
Section: Introductionmentioning
confidence: 99%
“…They proposed the strategy of zero infeed and stopping the running of the wire electrode, which were applied to improve the fabrication repeatability of microshafts in the range of ±2 µm via WEDG. An improved WEDG method was developed by Zou et al [24]. It processes a new feature of a positioning device to address the wire vibration problem, enabling the method to enhance the micro-shafts fabrication precision of 14 µm diameter micro-shafts with less than 0.4 µm deviation and an aspect ratio of 142.…”
Section: Introductionmentioning
confidence: 99%