10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems 2015
DOI: 10.1109/nems.2015.7147414
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Precision control of piezoelectric actuator using fuzzy feedback control with inverse hysteresis compensation

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Cited by 8 publications
(5 citation statements)
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“…The method of feedforward control collects information through a pre-experiment, observes the law to estimate the trend, and applies pre-control methods in front of the system to correct the compensation result. It is one of the commonly used compensation control methods in control engineering [31][32][33].…”
Section: Compensation Theory and Inverse Slpi Modelmentioning
confidence: 99%
“…The method of feedforward control collects information through a pre-experiment, observes the law to estimate the trend, and applies pre-control methods in front of the system to correct the compensation result. It is one of the commonly used compensation control methods in control engineering [31][32][33].…”
Section: Compensation Theory and Inverse Slpi Modelmentioning
confidence: 99%
“…The effect is widely used in micro/nanofabrication, nanopositioning, high-speed electric spindles, atomic force microscopy, scanning tunneling microscopy, piezoelectric deformation mirrors, and other precision mechanical engineering fields [3][4][5][6][7][8]. However, the nonlinear output caused by the inherent properties of the piezoelectric material can affect the accuracy of the nanopositioning stage, requiring the effective compensation and control of the piezoelectric actuator [9,10]. The hysteresis characteristic is the most important factor contributing to the nonlinear characteristics [11,12].…”
Section: Introductionmentioning
confidence: 99%
“…Recent studies highlighted 4 main characteristics of an actuator: (i) Low cost of construction; (ii) A basic geometrical design; (iii) A high value of the generated torque and; (iv) A higher precision motion [3][4][5][6]. Currently, many actuators display a precision motion [7][8][9][10][11][12]. The piezoelectric and the electrostatic actuators were seen to be common linear motion actuators, which displayed a shorter working range [13].…”
Section: Introductionmentioning
confidence: 99%