Precision Assembling and Hybrid Bonding for Micro Fluidic Systems

Abstract

An automated process is described to assemble highly functionalized micro fluidic cartridges. Different materials such as glass, silicon and thermoplastics can be bonded using adhesive gaskets. The assembling and bonding sequence is realized at room temperature so that the biological function of the cartridge is fully preserved. Several control tests for alignment and orientation are integrated into the process so that a precise and reliable assembly using robotic equipment can be achieved.