Precise phase control of resonant MOEMS mirrors by comb-drive current feedback

Brunner, David O.; Yoo, Han Woong; Schitter, Georg

doi:10.1016/j.mechatronics.2020.102420

Cited by 11 publications

(6 citation statements)

References 23 publications

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“…Thus, the quasi-static working bandwidth, which is the reciprocal of the settling time, improves to over 500 Hz. Fraunhofer Institute for Photonic Microsystems, Germany [12] MEMS 350 Hz 150 mrad 1.7 mrad 87 μrad Automation and Control Institute, Austria [14] MEMS 1000 Hz 253 mrad -300 μrad…”

Section: Resultsmentioning

confidence: 99%

“…The optical sensor is usually linearly related to the angular signal with a designed optical path, while it has a slower sensing rate. Due to the diversity of MEMS FSM structures, they can integrate some sensors, such as piezoresistance sensors [12,13] and capacitive sensors [14,15] . Their feedback signal is usually linear or quadratic in relation to the angular signal, and they are normally relatively fast sensing, as well.…”

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confidence: 99%

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Control of a MEMS Fast Steering Mirror With Improved Quasi-Static Performance

Zihao,

Lihao,

Yang

et al. 2023

IEEE Access

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This paper presents a control algorithm for a novel micro-electro-mechanical system (MEMS) fast steering mirror (FSM), whose performance is poor in open loop control mode. Based on the characterization and parameter identification of MEMS FSM, an improved double step algorithm is proposed to shorten the settling time and improve its quasi-static working bandwidth. A characterization system is set up, in which optical sensor is utilized to monitor the tilt angle of FSM. The performance of the FSM in the time and frequency domain are both acquired, while the key parameters of the FSM model are identified. Finally, the closed-loop experiments for the FSM are done to verify the effectiveness of the control algorithm. The experimental results demonstrate that the settling time (98%) of the FSM is effectively reduced from 398 ms to 0.4 ms under the improved double step control mode, which has a better tracking performance and tiny overshoot, comparing with the open loop control mode.INDEX TERMS MEMS, micro mirror, tracking control, improved double step algorithm I. INTRODUCTIONFast steering mirror (FSM) is an optical device for quickly and accurately adjusting the direction of the reflected laser, which, as a significant component, can therefore acquire and track the optical signal to provide a stable communication link [1][2][3][4][5] . FSM is mainly divided into voice coil motor FSM, piezoelectric ceramic FSM, and MEMS FSM. The eigenfrequency of the voice coil motor FSM is usually in the range of 100 Hz to 700 Hz [6] . Therefore, the voice coil motor is prone to resonate. The hysteresis is a difficulty for piezoelectric ceramic FSM control, which will become pronounced, especially under high driving voltages [7] . This characteristic leads to the nonlinearity of FSM, so a compensation algorithm is necessary to be implemented in the driver [8] . Micro-electro-mechanical system (MEMS) mirrors, as a class of integrated chip-based mirrors, can be flexibly designed in materials and structure for different applications. Thus, the MEMS FSM can be designed to avoid some of these difficulties in a certain

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Section: Resultsmentioning

confidence: 99%

mentioning

confidence: 99%

Control of a MEMS Fast Steering Mirror With Improved Quasi-Static Performance

Zihao,

Lihao,

Yang

et al. 2023

IEEE Access

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“…In the experiment, ±1.3° scanning was achieved at 23.44 kHz. Brunner [ 20 ] proposed a novel digital PLL with a position-sensitive detector (PSD), a charge-coupled device (CCD), and a continuous laser source implemented in FPGA. The circuit was operated at a 100 MHz internal clock to realize 100 Hz and 28.76° scanning with a setting time of approximately 88.9 ms.…”

Section: Introductionmentioning

confidence: 99%

Design of an Electromagnetic Micro Mirror Driving System for LiDAR

Chen,

Zhang,

Zhang

et al. 2024

Sensors

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Electromagnetic micro mirrors are in great demand for light detection and ranging (LiDAR) applications due to their light weight and low power consumption. The driven frequency of electromagnetic micro mirrors is very important to their performance and consumption. An electromagnetic micro mirror system is proposed in this paper. The model of the system was composed of a micro mirror, an integrated piezoresistive (PR) sensor, and a driving circuit was developed. The twisting angle of the mirror edge was monitored by an integrated PR sensor, which provides frequency feedback signals, and the PR sensor has good sensitivity and linearity in testing, with a maximum of 24.45 mV/deg. Stable sinusoidal voltage excitation and frequency tracking was realized via a phase-locked loop (PLL) in the driving circuit, with a frequency error within 10 Hz. Compared with other high-cost solutions using PLL circuits, it has greater advantages in power consumption, cost, and occupied area. The mechanical and piezoresistive properties of micro mirrors were performed in ANSYS 19.2 software. The behavior-level models of devices, circuits, and systems were validated by MATLAB R2023a Simulink, which contributes to the research on the large-angle deflection and low-power-consumption drive of the electromagnetic micro mirror. The maximum optical scan angle reached 37.6° at 4 kHz in the behavior-level model of the micro mirror.

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“…Mechatronic systems engineering is also relevant to many sensor systems. The papers [5,6] are concerned with the mechatronic design, optimization and control of optical sensors. In particular, Schlarp et al [5] presents the mechatronic design and control of an optical scanning laser sensor with the application to 3D imaging.…”

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confidence: 99%

“…A second topic in scanning-motion optical sensing is the accurate phase detection and control of micro-opto-electro-mechanical system mirrors (MOEMS), which is crucial for high-resolution imaging. The authors of [6] propose a novel precise phase-detection method and a digital phase-locked loop that uses an asynchronous logic for high-precision driving and immediate phase compensation. The authors further develop a fast start-up procedure that brings the MOEMS to its maximum amplitude within less than 100 ms and does not require detailed prior knowledge of the used device.…”

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confidence: 99%