Precise patterning of diamond films for MEMS application

Xd, Wang; Hong, GD; Zhang, J; Lin, Bin; Gong, HQ; Wy, Wang

doi:10.1016/s0924-0136(02)00147-4

Cited by 21 publications

(3 citation statements)

References 5 publications

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“…Many groups have investigated the possibilities and properties of various DLC coatings for MEMS devices [9,[37][38][39][40][41], but have not examined its effectiveness on actual working MEMS devices. We evaluated a conformal DLC coating and examined the friction and wear characteristics on MEMS devices.…”

Section: Introductionmentioning

confidence: 99%

Performance results of MEMS coated with a conformal DLC

Smallwood

Eapen

Patton

et al. 2006

Wear

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Section: Introductionmentioning

confidence: 99%

Performance results of MEMS coated with a conformal DLC

Smallwood

Eapen

Patton

et al. 2006

Wear

View full text Add to dashboard Cite

“…One of the most commonly tested coatings at the micro scale is diamondlike carbon (DLC) [ 79 , 105 , 110 , 133 , 166 , 169 , 170 , 171 , 172 , 173 , 174 , 175 , 176 , 177 , 178 ]. The main drive for examining DLC coatings at the micro-scale is due to its desirable properties (e.g., chemical inertness, high hardness, high wear resistance, and low friction), which has made DLC a longstanding protective coating for surfaces of hard drive platters [ 179 , 180 ] and a leading candidate for solid lubrication of micro-devices [ 181 ].…”

Section: Materials In Microtribologymentioning

confidence: 99%

Scaling Effects on Materials Tribology: From Macro to Micro Scale

Stoyanov

Chromik

2017

Materials

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The tribological study of materials inherently involves the interaction of surface asperities at the micro to nanoscopic length scales. This is the case for large scale engineering applications with sliding contacts, where the real area of contact is made up of small contacting asperities that make up only a fraction of the apparent area of contact. This is why researchers have sought to create idealized experiments of single asperity contacts in the field of nanotribology. At the same time, small scale engineering structures known as micro- and nano-electromechanical systems (MEMS and NEMS) have been developed, where the apparent area of contact approaches the length scale of the asperities, meaning the real area of contact for these devices may be only a few asperities. This is essentially the field of microtribology, where the contact size and/or forces involved have pushed the nature of the interaction between two surfaces towards the regime where the scale of the interaction approaches that of the natural length scale of the features on the surface. This paper provides a review of microtribology with the purpose to understand how tribological processes are different at the smaller length scales compared to macrotribology. Studies of the interfacial phenomena at the macroscopic length scales (e.g., using in situ tribometry) will be discussed and correlated with new findings and methodologies at the micro-length scale.

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“…Currently there are several methods to pattern NCD films: top-down reactive-ion etching (RIE), ,− laser ablation, ,, photolithographic etching, and bottom-up selective nanodiamond (ND) particle seeding, all of which have their own merits. RIE is a destructive process in which photolithographic methods are used in conjunction with typically oxygen/argon RF plasmas to remove unwanted areas of NCD film.…”

Section: Introductionmentioning

confidence: 99%

Patterning of Nanodiamond Tracks and Nanocrystalline Diamond Films Using a Micropipette for Additive Direct-Write Processing

Taylor

Edgington

Jackman

2015

ACS Appl. Mater. Interfaces

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The ability to pattern the seeding of nanodiamonds (NDs), and thus selectively control areas of diamond growth, is a useful capability for many applications, including photonics, microelectromechanical systems (MEMS) prototyping, and biomaterial design. A microprinting technique using a computer-driven micropipette has been developed to deposit patterns of ND monolayers from an unreactive water/glycerol ND ink to 5-μm resolution. The concentration and composition of the ND solution were optimized to realize high-density monolayers of NDs and consistent ND printing. Subsequent nanocrystalline diamond (NCD) patterns grown using chemical vapor deposition showed a high level of compliance with the printed ND pattern. This "direct-write", bottom-up, and additive process offers a versatile and simple alternative to pattern diamond. The process has the particular advantage that it does not require lithography or destructive processing such as reactive-ion etching (RIE) and, pertinently, does not involve reactive chemicals that could alter the surface chemistry of NDs. Furthermore, given that this process obviates the use of conventional lithography, substrates that are not suitable for lithographic processing (e.g., excessively small or three-dimensional structured substrates) can be inscribed with ND patterns. The technique also allows for the growth of discrete, localized, single-crystal nanodiamonds with applications in quantum technology.

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Precise patterning of diamond films for MEMS application

Cited by 21 publications

References 5 publications

Performance results of MEMS coated with a conformal DLC

Performance results of MEMS coated with a conformal DLC

Scaling Effects on Materials Tribology: From Macro to Micro Scale

Patterning of Nanodiamond Tracks and Nanocrystalline Diamond Films Using a Micropipette for Additive Direct-Write Processing

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