“…One of the most commonly tested coatings at the micro scale is diamondlike carbon (DLC) [ 79 , 105 , 110 , 133 , 166 , 169 , 170 , 171 , 172 , 173 , 174 , 175 , 176 , 177 , 178 ]. The main drive for examining DLC coatings at the micro-scale is due to its desirable properties (e.g., chemical inertness, high hardness, high wear resistance, and low friction), which has made DLC a longstanding protective coating for surfaces of hard drive platters [ 179 , 180 ] and a leading candidate for solid lubrication of micro-devices [ 181 ].…”