Precise Oscillation Loop for a Resonant Type MEMS Inertial Sensors

Hyun, Chul; Lee, Jang Gyu; Kang, Taesam

doi:10.1109/sice.2006.315351

Cited by 7 publications

(5 citation statements)

References 8 publications

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“…2.The output of the PLL is first add with the DC voltage and then fed to the driving combs of the accelerometer. The position of the accelerometer is measured by capacitive sensing circuits and then become a digital logic signal after a comparator [4,5]. The phase difference between the measured position signal and the excitation signal, which is the output of the VCO, is compared by the phase detector.…”

Section: The Resonance Frequency Track Systemmentioning

confidence: 99%

Design of the Resonance Tracking System for a Resonant Accelerometer Based on Electrostatic Stiffness

Liu¹,

Xiao

et al. 2011

KEM

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The main advantage of a resonant accelerometer based on electrostatic stiffness over other sensing principles is it can make use of the sensing voltage to adjust the sensitivity. The dynamic model of this accelerometer is built. With the aim to achieve the resonance frequency track, a phase-locked loop(PLL) system is used to track the resonance frequency due to changing of the acceleration, the model for the control system is established and the system behavior are analyzed using an averaging method. The analysis provides a quantitative criterion for selecting the control parameters to achieve system stability, the integral control gain will critical to the system stability and stability time. Simulation results are shown to be in agreement with the all theoretical analysis.

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Section: The Resonance Frequency Track Systemmentioning

confidence: 99%

Design of the Resonance Tracking System for a Resonant Accelerometer Based on Electrostatic Stiffness

Liu¹,

Xiao

et al. 2011

KEM

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“…A micromechanical silicon resonant accelerometer (MSRA) with high sensitivity and resolution has frequency as its output signal, as well as the advantages of wide dynamic range, anti-interference ability, and high stability. Given its significant advantages and high-precision measurement, it has become one of the most popular highprecision Micro Electro-Mechanical Systems [1][2][3][4]. The publicly reported MSRA with the highest performance, has a scale factor stability of 0.14 ppm and a bias stability of 0.19μg, was developed by the Draper laboratory [2].…”

Section: Introductionmentioning

confidence: 99%

Design of Temperature Sensitive Structure for Micromechanical Silicon Resonant Accelerometer

Huang

Ran

et al. 2017

2017 International Conference on Computer Network, Electronic and Automation (ICCNEA)

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A micromechanical silicon resonant accelerometer (MSRA) is a potential micro accelerometer with high accuracy. One of the most important factors affecting its performance is temperature. To research the effect of temperature on micromechanical silicon resonant accelerometer, this study based on the original micromechanical silicon resonant accelerometer, designs a chip-level temperature-sensitive structure which a pair of temperature resonators is arranged on both sides of the force resonator of the original accelerometer to ensure symmetry of the MSRA, as well as compares and selects the appropriate structure, fundamental frequency, and size. The ANSYS simulation is used to verify the rationality of the structure design. The MSRA is fabricated using the Deep Dry Silicon on Glass technique and packaged in metal shell, a measurement circuit is designed and a full temperature test is conducted. The results show that the resonant frequency of the temperature resonator is strongly sensitive to temperature changes but not sensitive to acceleration, and that it can reflects temperature change in the package cavity. Therefore, the temperature resonator can achieve accurate temperature measurement of accelerometer and can be used in temperature compensation.

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“…Unfortunately, the mismatch between the drive frequency and the resonance frequency hampered its practical application. There are mainly two methods used in frequency tracking: self-oscillation [ 21 , 22 , 23 , 24 , 25 ] and phase locked loop (PLL) [ 26 , 27 , 28 , 29 ]. Here, we present a solution to this problem based on a closed-loop control which realizes drive frequency tracked with mechanical resonance frequency.…”

Section: Introductionmentioning

confidence: 99%

Self-Oscillation-Based Frequency Tracking for the Drive and Detection of Resonance Magnetometers

Tian

Ren

You

2016

Sensors

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This paper reports a drive and detection method for Micro-Electro-Mechanical System (MEMS)-based Lorentz-force resonance magnetometers. Based on the proposed MEMS magnetometer, a drive and detection method was developed by using self-oscillation to adjust the mismatch between the mechanical resonance frequency and the coil drive frequency as affected by temperature fluctuations and vibration amplitude changes. Not only was the signal-to-noise ratio enhanced by the proposed method compared to the traditional method, but the test system automatically reached resonance frequency very rapidly when powered on. Moreover, the linearity and the measurement range were improved by the magnetic feedback generated by the coil. Test results indicated that the sensitivity of the proposed magnetometer is 59.6 mV/μT and its noise level is 0.25 μT. When operating in ±65 μT, its nonlinearity is 2.5‰—only one-tenth of the former prototype. Its power consumption is only about 250 mW and its size is only 28 mm × 28 mm × 10 mm, or about one-eighth of the original sensor; further, unlike the former device, it can distinguish both positive and negative magnetic fields. The proposed method can also be applied in other MEMS sensors such as gyroscopes and micromirrors to enhance their frequency tracking ability.

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Precise Oscillation Loop for a Resonant Type MEMS Inertial Sensors

Cited by 7 publications

References 8 publications

Design of the Resonance Tracking System for a Resonant Accelerometer Based on Electrostatic Stiffness

Design of the Resonance Tracking System for a Resonant Accelerometer Based on Electrostatic Stiffness

Design of Temperature Sensitive Structure for Micromechanical Silicon Resonant Accelerometer

Self-Oscillation-Based Frequency Tracking for the Drive and Detection of Resonance Magnetometers

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